A Study on the Ozone Reduction of Plasma Devices by Catalyst Method
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Jeon, Sin Young
(Department of Advanced Materials Engineering, Korea Polytechnic University)
Kim, Dong Jun (Department of Advanced Materials Engineering, Korea Polytechnic University) Kim, Jong Yeop (Department of Advanced Materials Engineering, Korea Polytechnic University) Gwon, Jin Gu (Department of Advanced Materials Engineering, Korea Polytechnic University) Jeon, Young Min (Department of Advanced Materials Engineering, Korea Polytechnic University) Do, Gye Ryung (Department of Advanced Materials Engineering, Korea Polytechnic University) Lee, Seong Eui (Department of Advanced Materials Engineering, Korea Polytechnic University) |
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