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http://dx.doi.org/10.4313/JKEM.2018.31.7.475

CrC Interlayer Effect on Tribological Properties of Amorphous Carbon Deposited by UBMS Method  

Kim, Phil Jung (Department of Electronics, Chosun College of Science and Technology)
Park, Yong Seob (Department of Electronics, Chosun College of Science and Technology)
Publication Information
Journal of the Korean Institute of Electrical and Electronic Material Engineers / v.31, no.7, 2018 , pp. 475-480 More about this Journal
Abstract
We investigated the tribological properties of amorphous carbon (a-C) films deposited with CrC interlayers of various thicknesses as the adhesive layer. A-C and CrC thin films were deposited using the unbalanced magnetron (UBM) sputtering method with graphite and chromium as the targets. CrC films as the interlayer were fabricated under a-C films, and various structural, surface, and tribological properties of a-C films deposited with various CrC interlayer thicknesses were investigated. With various CrC interlayer thicknesses under a-C films, the tribological properties of CrC/a-C films were improved; the increased film thickness exhibited a maximum high hardness of over 27.5 GPa, high elastic modulus of over 242 GPa, critical load of 31 N, residual stress of 1.85 GPa, and a smooth surface below 0.09 nm at the condition of 30-nm CrC thickness.
Keywords
Cr doped amorphous carbon; Unbalanced magnetron sputtering; Hardness and elastic modulus; Adhesion; Residual stress;
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