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http://dx.doi.org/10.4313/JKEM.2017.30.2.67

Synthesis of Electro-conducting Macroporous Aluminosilicate-Carbon Nanocomposite  

Choi, Kwang Min (Icheon Branch, Korea Institute of Ceramic Engineering and Technology)
Cho, Woo-Seok (Icheon Branch, Korea Institute of Ceramic Engineering and Technology)
Kim, Jong-Young (Icheon Branch, Korea Institute of Ceramic Engineering and Technology)
Jung, Jong-Yeol (Maxtech Co. Ltd.)
Baik, Seung-Woo (Maxtech Co. Ltd.)
Lee, Kyu Hyoung (Department of Nano Applied Engineering, Kangwon National University)
Publication Information
Journal of the Korean Institute of Electrical and Electronic Material Engineers / v.30, no.2, 2017 , pp. 67-73 More about this Journal
Abstract
Recently, macroporous ceramic materials with high electrical conductivity and mechanical strength are urgently needed for semiconductor and display manufacturing devices. In this work, we obtained electro-conducting macroporous aluminosilicate ceramics having surface resistivity of 108~1,010 ohm by dispersing electro-conducting carbon in ceramic matrix. By addition of 0.5~3.0 wt% frit glass, chemical bonding between grains was strengthened, and flexural strength was enhanced up to 160 MPa as a result. We evaluated the characteristics of present ceramics as vacuum chuck module for liquid crystal display display manufacturing devices.
Keywords
Macroporous; Aluminosilicate; Anti-static; High strength; Vacuum chuck;
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