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http://dx.doi.org/10.4313/JKEM.2017.30.11.740

Improvement of Optical and Electrical Properties of ITO/Ag/ITO Thin Films for Transparent Conducting Electrode  

Shin, Yeon Bae (Department of Energy Convergence Engineering, Cheongju University)
Kang, Dong-Won (Department of Energy Convergence Engineering, Cheongju University)
Kim, Jeha (Department of Energy Convergence Engineering, Cheongju University)
Publication Information
Journal of the Korean Institute of Electrical and Electronic Material Engineers / v.30, no.11, 2017 , pp. 740-744 More about this Journal
Abstract
Herein we studied the electrical and optical properties of indium tin oxide ITO/Ag/ITO multilayer thin films for application in transparent conducting electrodes. The ITO and Ag thin films were deposited onto soda lime glass (SLG) using radiofrequency and DC-sputtering methods, respectively. The as-synthesized ITO/Ag/ITO multilayer thin films were analyzed using 4-point probe, UV-Visible spectroscopy, and Hall measurement. We observed a rapid increase in electron concentration with increasing Ag thickness. However, electron mobility decreased with increasing Ag thickness. Finally, ITO/Ag/ITO multilayer thin films showed a characteristic low sheet resistance of $18{\Omega}/sq$ and high optical transmittance value (80%) with variation of Ag thickness (5~10 nm).
Keywords
Transparent conducting electrodes; Thin films; ITO; ITO/Ag/ITO; Mobility; Electron concentration;
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