Study on Improving Surface Structure with Changing RF Power Conditions in RIE (reactive ion etching) |
Park, Seok-Gi
(Graduate School of Energy Science and Technology, Chungnam National University)
Lee, Jeong In (Photovoltaic Laboratory, Korea Institute of Energy Research) Kang, Min Gu (Photovoltaic Laboratory, Korea Institute of Energy Research) Kang, Gi-Hwan (Photovoltaic Laboratory, Korea Institute of Energy Research) Song, Hee-eun (Photovoltaic Laboratory, Korea Institute of Energy Research) Chang, Hyo Sik (Graduate School of Energy Science and Technology, Chungnam National University) |
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