Browse > Article
http://dx.doi.org/10.4313/JKEM.2015.28.6.384

A Study on the Fabrication and Electrical Characteristics of Hydraulic Pressure Sensors by Using Ceramics Materials  

Park, Sung-Hyun (Department of Electrical Engineering, Dong-eui University)
Kim, Eun-Sup (Institute of Mirrnt Co., Ltd.)
Jung, Jung-Kyun (Institute of Mirrnt Co., Ltd.)
Publication Information
Journal of the Korean Institute of Electrical and Electronic Material Engineers / v.28, no.6, 2015 , pp. 384-389 More about this Journal
Abstract
In this paper, we fabricated ceramic body and sapphire wafer in order to develop a hydraulic pressure sensor with high sensitivity and high temperature stability. The sapphire wafer was adopted with a membrane of capacitance ceramic pressure sensor. The capacitance value of the sensor for the finite element analysis(FEM) showed a linear pressure characteristics. Membrane was processed with a diameter of 32.4 mm and a thickness of 1 mm by using alumina powders. Ceramic body was processed with a diameter 32.4 mm and a thickness 5 mm. The capacitance pressure sensor was made with high heat treatment of the ceramic body and the sapphire wafer. Initially capacitance of the pressure sensor was 50 pF and a capacitance of 110 pF was measured from 5 bar pressure. Output voltage of 5 V was appeared at 5 bar pressure.
Keywords
Hydraulic pressure sensor; Capacitance type; Sapphire; Ceramics; Brazing;
Citations & Related Records
연도 인용수 순위
  • Reference
1 Y. J. Kim, Y. C. Lee, D. H. Kwon, and B. K. Sohn, J. of the Korean Sensors Society, 10, 26 (2001).
2 J. D. Lee, J. of the Korean Sensors Society, 13, 152 (2004).
3 M. Yamada and K. Watanabe, IEEE Trans. on Instrumentation and Measurement, 46, 2 (1997).
4 S. Som, Capacitive Differential Pressure Detector, Patent of USA. No. 5,925,824
5 Y. Yamashita, Y. Hosono, and N. Ichinose, Jpn. J. of Appl. Phys., 37, 5288 (1998).   DOI