Properties of Reducing On-resistance for JFET Region in Power MOSFET by Double Ion Implantation
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Kim, Ki Hyun
(R&D Center, Maple Semiconductor Inc.)
Kim, Jeong Han (R&D Center, Maple Semiconductor Inc.) Park, Tae-Su (R&D Center, Maple Semiconductor Inc.) Jung, Eun-Sik (R&D Center, Maple Semiconductor Inc.) Yang, Chang Heon (R&D Center, Maple Semiconductor Inc.) |
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