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http://dx.doi.org/10.4313/JKEM.2013.26.7.510

Characteristics of IGZO/Ag/IGZO Multilayer Thin Films Depending on Ag Thickness  

Zhang, Ya-Jun (Semiconductor of Electronic Engineering, Cheongju University)
Kim, Hong-Bea (Department of Semiconductor Engineering, Cheongju University)
Lee, Sang-Yeol (Department of Semiconductor Engineering, Cheongju University)
Publication Information
Journal of the Korean Institute of Electrical and Electronic Material Engineers / v.26, no.7, 2013 , pp. 510-514 More about this Journal
Abstract
In order to prevent heat loss that occurs through the glass, low-emissivity (Low-E) coating methods with good insulating properties and high transmittance were used. InGaZnO/Ag/InGaZnO (IGZO/Ag/IGZO) multilayer thin films have been deposited on XG glass substrate by RF magnetron sputtering. Depending on the different thickness of Ag in multilayer films, the structural and optical properties of Low-E multilayer films were analyzed. By XRD analysis results, the multilayer thin films were observed to be amorphous structure regardless of Ag thickness. According to the AFM results, surface morphology of the multilayer films was observed and compared. Using UV-VIS spectroscopy, low emissivity property has been observed clearly with the transmittance of higher than 85% at visible range and lower than 30% at IR range.
Keywords
IGZO/Ag/IGZO; Oxide/Metal/Oxide(OMO); Low emissivity; Evaporator; RF sputter; Ag thickness;
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