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http://dx.doi.org/10.4313/JKEM.2013.26.4.321

Structural and Optical Properties of Multilayer Films of IGZO / Ag / IGZO for Low Emissivity Applications  

Wang, Hong Rae (Department of Electronic Engineering Cheongju University)
Kim, Hong Bae (Department of Semiconductor Engineering Cheongju University)
Lee, Sang Yeol (Department of Semiconductor Engineering Cheongju University)
Publication Information
Journal of the Korean Institute of Electrical and Electronic Material Engineers / v.26, no.4, 2013 , pp. 321-324 More about this Journal
Abstract
In this study, The RF magnetron sputter and evaporator was on glass substrates 30 mm ${\times}$ 30 mm OMO multilayer thin film structure is applied to the low-e. Structural and optical properties, a thin film was produced, the variable was placed into a variable deposition time of the oxide layer. According to the XRD measurement results there is no peak that satisfies the Bragg's law ($2dsin{\theta}=n{\lambda}$) which confirmed that it is an amorphous structure. RMS value of the results of the AFM measurement, has a roughness of less than 2 nm. transmittance measurements results, visible light region an average 80%, IR region 40% showed.
Keywords
Low-e; Oxide; Multilayer; OMO; IGZO/Ag/IGZO;
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