A Study on the Characteristics of NbOx Thin Film at Various Frequencies of Pulsed DC Sputtering by In-Line Sputter System |
Eom, Jimi
(Department of Electronics Engineering, Gachon University)
Oh, Hyungon (Department of Electronics Engineering, Myongji University) Kwon, Sang Jik (Department of Electronics Engineering, Gachon University) Park, Jung Chul (Department of Electronics Engineering, Gachon University) Cho, Eou Sik (Department of Electronics Engineering, Gachon University) Cho, Il Hwan (Department of Electronics Engineering, Myongji University) |
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