A Study on Etching Characteristics of SnO2 Thin Films Using High Density Plasma |
Kim, Hwan-Jun
(School of Electrical and Electronics Engineering, Chung-Ang University)
Joo, Young-Hee (School of Electrical and Electronics Engineering, Chung-Ang University) Kim, Seung-Han (School of Electrical and Electronics Engineering, Chung-Ang University) Woo, Jong-Chang (School of Electrical and Electronics Engineering, Chung-Ang University) Kim, Chang-Il (School of Electrical and Electronics Engineering, Chung-Ang University) |
1 | J. F. Wager, Transparent Electronics Display Applications (SID 07 Digest, 2007) p. 1824. |
2 | M. Prins, S. Zinnemers, J. Cillessen, and J. Giesbers, Appl. Phys. Lett., 70, 458 (1997). DOI ScienceOn |
3 | R. Presley, C. Munsee, C. Park, D. Hong, J. Wager, and D. Keszler, J. Phys. D, Appl. Phys., 37, 2810 (2004). |
4 | H. Hidenori, N. Kenji, Y. Hiroshi, K. Toshio, H. Masahiro, and H. Hideo, Appl. Phys. Lett., 93, 032113 (2008). DOI ScienceOn |
5 | Y. Ogo, H. Hiramatsu, K. Nomura, H. Yanagi, T. Kamiya, M. Kimura, M. Hirano, and H. Hosono, Physica Status Solidi., 206, 2187 (2009). DOI ScienceOn |
6 | X. Yang, J. C. Woo, D. S. Um, and C. I. Kim, Trans. Electr. Electron. Mater., 11, 202 (2010). DOI ScienceOn |
7 | S. I. Kim and K. H. Kwon, Trans. Electr. Electron. Mater., 10, 1 (2009). DOI ScienceOn |
8 | J. Szuber, G. Czempik, R. Larciprete, and B. Adamowicz, Sensr and Actuators., 70, 177 (2000). DOI ScienceOn |
9 | J. Szuber, G. Czempik, R. Larciprete, D. Koziej, and B. Adamowicz, Thin Soild Films, 391, 198 (2001). DOI ScienceOn |
10 | M. Kwoka, L. Ottaviano, M. Passacantando, S. Santucci, G. Czempik, and J. Szubera, Thin Solid Films, 490, 36 (2005). DOI ScienceOn |