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http://dx.doi.org/10.4313/JKEM.2013.26.10.731

Structural and Electrical Properties of Semiconducting YBCO Thin Film Annealed at Various Temperatures for Uncooled Infrared Sensor Application  

Lee, Tae-Ho (Department of Ceramic Engineering, Engineering Research Institute, Gyeongsang National University)
Lee, Sung-Gap (Department of Ceramic Engineering, Engineering Research Institute, Gyeongsang National University)
Yeo, Jin-Ho (Department of Ceramic Engineering, Engineering Research Institute, Gyeongsang National University)
Jung, Hye-Rin (Department of Ceramic Engineering, Engineering Research Institute, Gyeongsang National University)
Publication Information
Journal of the Korean Institute of Electrical and Electronic Material Engineers / v.26, no.10, 2013 , pp. 731-735 More about this Journal
Abstract
YBCO thin films on $SiO_2$/Si substrate were fabricated by spin-coaing of an alkoxide-derived precursor and heat treatment. The structural and electrical properties of the YBCO films were investigated as functions of annealing temperature at $600{\sim}800^{\circ}C$. Although YBCO single phase was not synthesized, dense films of YBCO matrix phase and minor second phases have been successfully fabricated at the annealing temperatures of $650{\sim}800^{\circ}C$. Thickness and temperature coefficient of resistance (TCR) of YBCO thin films with annealing temperature of $750^{\circ}C$ were 0.31 ${\mu}m$ and $-2.92%/^{\circ}C$, respectively.
Keywords
Semiconducting YBCO; Thin film; Sol-gel;
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