A Study of the Dry Etching Properties of TiN Thin Film in He/BCl3/Cl2 Inductively Coupled Plasma |
Woo, Jong-Chang
(School of Electrical and Electronics Engineering, Chung-Ang University)
Joo, Young-Hee (School of Electrical and Electronics Engineering, Chung-Ang University) Park, Jung-Soo (School of Electrical and Electronics Engineering, Chung-Ang University) Kim, Chang-Il (School of Electrical and Electronics Engineering, Chung-Ang University) |
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