Study on Electrical Characteristics of Hafnium Silicate Films with Low Temperature O2 Annealing |
Lee, Jung-Chan
(School of Information and Communication Engineering, Sungkyunkwan University)
Kim, Kwang-Sook (School of Information and Communication Engineering, Sungkyunkwan University) Jeong, Seok-Won (School of Information and Communication Engineering, Sungkyunkwan University) Roh, Yong-Han (School of Information and Communication Engineering, Sungkyunkwan University) |
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