A Study of the Silicon Mold Surface Treatment Using CHF3 Plasma for Nano Imprint Lithography
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Kim, Young-Keun
(Department of Control and Instrumentation Engineering, Korea University)
Kim, Jae-Hyun (Department of Control and Instrumentation Engineering, Korea University) You, Ban-Seok (Department of Control and Instrumentation Engineering, Korea University) Jang, Ji-Su (Department of Control and Instrumentation Engineering, Korea University) Kwon, Kwang-Ho (Department of Control and Instrumentation Engineering, Korea University) |
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