Characteristics Analysis Related with Structure and Size of SONOS Flash Memory Device |
Yang, Seung-Dong
(Department of Electronics Engineering, Chungnam National University)
Oh, Jae-Sub (Nano Patterning Process Team, National Nanofab Center) Park, Jeong-Gyu (Department of Electronics Engineering, Chungnam National University) Jeong, Kwang-Seok (Department of Electronics Engineering, Chungnam National University) Kim, Yu-Mi (Department of Electronics Engineering, Chungnam National University) Yun, Ho-Jin (Department of Electronics Engineering, Chungnam National University) Choi, Deuk-Sung (Division of Electronics and Information Engineering, Yeungnam College of Science and Technology) Lee, Hee-Deok (Department of Electronics Engineering, Chungnam National University) Lee, Ga-Won (Department of Electronics Engineering, Chungnam National University) |
1 | C. W. Kim, M. K. Kim, and J. W. Lee, Physics and High Technology 13, 2 (2004). |
2 | S. Tiwari, F. Rana, H. Hanafi, A. Hartstein, E. F. Crabbe, and K. Chan, Appl. Phys. Lett. 68, 1377 (1996). DOI |
3 | T. Park, S. Choi, D. H. Lee, J. R. Yoo, B. C. Lee, J. Y. Kim, C. G. Lee, K. K. Chi, S. H. Hong, S. J. Hynn, Y. G. Shin, J. N. Han, I. S. Park, U. J. Chung, J. T. Moon, E. Yoon, and J. H. Lee, Symp. VLSI Technol. Dig. Tech. Papers (IEEE, 2003) p. 135 |
4 | F. Dauge, J. Pretet, S. Cristoloveanu, A. Vandooren, L. Mathew, J. Jomaah, and B. -Y. Nguyen, Solid-State Electron. 48, 535 (2004). DOI |
5 | M. Mehrotra and B. J. Baliga, IEDM '93 Tech. Dig. (IEEE, Washington DC, USA, 1993) p. 675. |
6 | L. Chang, Y.-K. Choi, D. Ha, P. Ranade, S. Xiong, J. Bokor, C. Hu, and T. J. King, Proc. IEEE, 91, 1860 (2003). |
7 | International Technology Roadmap for Semiconductors (ITRS) 2001 Edition, Table 38a, 38b (2001). |