1 |
C. Y. Hsu, T. F. Ko, and Y. M. Huang,
"Influence of ZnO buffer layer on AZO film
properties by radio frequency magnetron
sputtering", J. European Ceramic. Soc., Vol.
28, p. 3065, 2008.
DOI
|
2 |
S. H. Jeong and J. H. Boo, “Influence of
targe-to-substrate distance on the properties
of AZO films grown by RF magnetron
sputtering", Thin Solid Films, Vol. 447-448,
p. 105, 2004.
DOI
ScienceOn
|
3 |
W. Yang, Z. Liu, D. L. Peng, F. Zhang, H.
Huang, Y. Xie, and Z. Wu, "Room-temperature
deposition of transparent conducting Aldoped
ZnO films by RF magnetron
sputtering method", Appl. Surf. Sci., Vol.
255, p. 5669, 2009.
DOI
|
4 |
S. S. Lin, J. L. Huang, and P. Sajgalik,
"Effects of substrate temperature on the
properties of heavily Al-doped ZnO films
by simultaneous r.f. and d.c. magnetron
sputtering", Surf. Coating Technol., Vol.
190, p. 39, 2005.
DOI
ScienceOn
|
5 |
황동현, 손영국, 조신호, “Al 도핑된 ZnO 박막에서 방출되는 보라색 발광 스펙트럼”, 전기전자재료학회논문지, 20권, 4호, p. 318, 2007.
과학기술학회마을
DOI
|
6 |
조신호, “ 혼합 유량비를 변수로 갖는 라디오파 마그네트론 스퍼터링으로 성장된 ZnO 박막의 특성”, 전기전자재료학회논문지, 20권, 11호, p. 932, 2007.
과학기술학회마을
DOI
|
7 |
H. Ko, W. P. Tai, K. C. Kim, S. H. Kim, S.
J. Suh, and Y. S. Kim, “Growth of Al-doped
ZnO thin films by pulsed DC magnetron
sputtering", J. Crys. Growth, Vol. 277, p.
352, 2005.
DOI
|
8 |
Y. S. Jung, H. W. Choi, K. H. Kim, S. J.
Park, and H. H. Yoon, “Properties of AZO
thin films for solar cells deposited on
polycarbonate substrates”, J. Korean Phys.
Soc., Vol. 55, p. 1945, 2009.
DOI
|
9 |
S. Cho, “Structural and optical properties of
ZnO films grown on sapphire substrates
subjected to substrate temperature”, J.
Korean Phys. Soc., Vol. 49, p. 985, 2006.
|
10 |
M. E. Fragala, G. Malandrino, M. M.
Giangregorio, M. Losurdo, G. Bruno, S.
Lettieri, L. S. Amato, and P. Maddalena,
“Structural, optical, and electrical
characterization of ZnO and Al-doped ZnO
thin films deposited by MOCVD”, J. Crys.
Growth, Vol. 277, p. 327, 2005.
|
11 |
S. J. Kwon, “Effect of precursor-pulse on
properties of Al-doped ZnO films grown by
atomic layer deposition”, Jpn. J. Appl.
Phys., Vol. 44, p. 1062, 2005.
DOI
|
12 |
Z. H. Zhang, Z. Z. Ye, D. W. Ma, L. P.
Zhu, T. Zhou, B. H. Zhao, and Z. G. Fei,
“Preparation and characteristic of p-type
ZnO films by Al-N codoping technique”,
Mater. Lett., Vol. 59, p. 2732, 2005.
DOI
|
13 |
H. Ko, W. M. Kumar, R. M. Mehra, A.
Wakahara, M. Ishida, and A. Yoshida,
“Pulsed laser deposition of epitaxial Aldoped
ZnO film on sapphire with GaN
buffer layer”, Thin Solid Films, Vol. 484, p.
174, 2005.
DOI
ScienceOn
|
14 |
신현호, 강성준, 윤영섭, “Sol-gel 법으로 제작
한 Al-doped ZnO 박막의 도핑 농도 및 열처
리 온도에 따른 광학적 및 전기적 특성", 전
자공학회논문집, 44권, p. 408, 2007.
과학기술학회마을
|
15 |
S. H. Jeong, J. W. Lee, S. B. Lee, and J.
H. Boo, “Deposition of aluminum-doped zinc
oxide films by RF magnetron sputtering
and study of their structural, electrical and
optical properties”, Thin Solid Films, Vol.
435, p. 78, 2003.
DOI
|