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http://dx.doi.org/10.4313/JKEM.2010.23.1.001

A Study on Electrical Characteristics of Trench Field Ring for Breakdown Characteristics  

Kang, Ey-Goo (극동대학교 컴퓨터정보표준학부)
Kim, Beum-Jun (극동대학교 컴퓨터정보표준학부)
Lee, Young-Hun (극동대학교 컴퓨터정보표준학부)
Publication Information
Journal of the Korean Institute of Electrical and Electronic Material Engineers / v.23, no.1, 2010 , pp. 1-5 More about this Journal
Abstract
In this paper, we proposed trench field ring for breakdown voltage of power devices. The proposed trench field ring was improved 10% efficiency comparing with conventional field ring. we analyzed five parameters of trench field ring for design of trench field ring and carried out 2-D devices simulation and process simulations. That is, we analyzed number of field ring, juction depth, distance of field rings, trench width, doping profield. The proposed trench field ring was better to more 1000 V.
Keywords
Power devices; Trench field ring; Breakdown voltage; Field plate; Trench depth;
Citations & Related Records
Times Cited By KSCI : 1  (Citation Analysis)
연도 인용수 순위
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