Browse > Article
http://dx.doi.org/10.4313/JKEM.2009.22.4.342

Optimization of Growth Gases for the Low-temperature Synthesis of Carbon Nanotubes  

Kim, Young-Rae (세종대학교 나노공학과)
Jeon, Hong-Jun (세종대학교 나노공학과)
Lee, Han-Sung (세종대학교 나노공학과)
Goak, Jeung-Choon (세종대학교 나노공학과)
Hwang, Ho-Soo (세메스 주식회사)
Kong, Byung-Yun (세메스 주식회사)
Lee, Nae-Sung (세종대학교 나노공학과)
Publication Information
Journal of the Korean Institute of Electrical and Electronic Material Engineers / v.22, no.4, 2009 , pp. 342-349 More about this Journal
Abstract
This study investigated the growth characteristics of carbon nanotubes (CNTs) by changing a period of annealing time and a $C_{2}H_{2}/H_2$ flow ratio at temperature as low as $450^{\circ}C$ with inductively coupled plasma chemical vapor deposition. The 1-nm-thick Fe-Ni-Co alloy thin film served as a catalyst layer for the growth of CNTs, which was thermally evaporated on the 15-nm-thick Al underlayer deposited on the 50-nm-thick Ti diffusion barrier. The annealing at low temperature of $450^{\circ}C$ brought about almost no granulation of the catalyst layer, and the CNT growth was not affected by a period of annealing time. A study of changing the flow rate of $C_{2}H_{2}$ and $H_2$ showed that as the ratio of the $C_{2}H_{2}$ flow rate to the $H_2$ flow rate was lowered, the CNTs were grown to be longer With further decreasing the flow ratio, the length of CNTs reached the maximum and then became shorter. Under the optimized gas flow rates, we successfully synthesized CNTs with a uniform length over a 4-inch Si wafer at $450^{\circ}C$.
Keywords
Carbon nanotubes; Low temperature synthesis; Plasma enhanced chemical vapor deposition; Growth gas;
Citations & Related Records
Times Cited By KSCI : 1  (Citation Analysis)
연도 인용수 순위
1 H. J. Cho, N. S. Lee, I. G. Jang, H. S. Uh, and J. P. Hong, 'Field emission from carbon nanotubes etched by a dc plasma', J. Kor. Phys. Soc., Vol. 50, No. 6, p. 1848, 2007   DOI   ScienceOn
2 C. Kanai, K. Watanabe, and Takakuwa, 'Ab initio calculations on etching of graphite and diamond surfaces by atomic hydrogen', Phys. Rev. B, Vol. 63, p. 235311, 2001   DOI   ScienceOn
3 K. M. Ervin, S. Gronert, S. E. Barlow, M. K. Gilles, A. G. Harrison, V. M. Bierbaum, C. H. DePuy, W. C. Lineberger, and G. B. Ellison, 'Bond strengths of ethylene and acetylene', J. Am. Chem. Soc., Vol. 112, p. 5750, 1990   DOI
4 Y. P. Zhang, C. H. Cheng, J. T. Kim, J. Stanojevic, and E. E. Eyler, 'Dissociation energies of molecular hydrogen and the hydrogen molecular ion', Phys. Rev. Lett., Vol. 92, No. 20, p. 203003, 2004   DOI   ScienceOn
5 R. F. Wood, S. Pannala, J. C. Wells, A. A. Puretzky, and D. B. Geohegan, 'Simple of the interrelation between single- and multiwall carbon nanotube growth rates for the CVD process', Phys. Rev. B, Vol. 75, p. 235446, 2007   DOI   ScienceOn
6 C. P. Deck and K. Vecchio, 'Prediction of carbon nanotube growth success by the analysis of carbon-catalyst binary phase diagrams', Carbon, Vol. 44, p. 267, 2006   DOI   ScienceOn
7 S. Honda, M. Katayama, K. Y. Lee, T. Ikuno, S. Ohkura, K. Oura, H. Furuta, and T. Hirao, 'Low temperature synthesis of aligned carbon nanotubes by inductively coupled plasma chemical vapor deposition using pure methane', Jpn. J. Appl. Phys., Vol. 42, p. L441, 2003   DOI   ScienceOn
8 D. Yokoyama, T. Iwasaki, T. Yoshida, H. Kawarada, S. Sato, T. Hyakushima, M. Nihei, and Y. Awano, 'Low temperature grown carbon nanotube interconnects using inner shells by chemical mechanical polishing', Appl. Phys. Lett., Vol. 91, p. 263101, 2007   DOI   ScienceOn
9 J. Han, W. S. Yang, J. B. Yoo, and C. Y. Park, 'Growth and emission characteristics of vertically well-aligned carbon nanotubes grown on glass substrate by hot filament plasma-enhanced chemical vapor deposition', J. Appl. Phys., Vol. 88, No. 12, p. 7363, 2000   DOI   ScienceOn
10 G. Eres, A. A. Kinkhabwala, H. Cui, D. B. Geohegan, A. A. Puretzky, and D. H. Lowndes, 'Molecular beam-controlled nucleation and growth of vertically aligned single-wall carbon nanotube arrays', J. Phys. Chem. B, Vol. 109, p. 16684, 2005   DOI   ScienceOn
11 W. S. Choi, S. H. Choi, B. Hong, D. G. Lim, K. J. Yang, and J. H. Lee, 'Effect of hydrogen plasma pretreatment on growth of carbon nanotubes by MPECVD', Mater. Sci. Eng. C, Vol. 26, p. 1211, 2006   DOI   ScienceOn
12 R. Y. Zhang, I. Amlani, J. Baker, J. Tresek, and R. K. Tsui, 'Chemical vapor deposition of single-walled carbon nanotubes using ultrathin Ni/Al film as catalyst', Nano Lett., Vol. 3, No. 6, p. 731, 2003   DOI   ScienceOn
13 C. D. Kim, J. T. Kang, H. W. Ryu, I. S. Lee, J. H. Park, C. S. Lee, E. W. Lee, and H. R. Lee, 'Wall-controlled growth of carbon nanotubes using temperature treatment', Jpn. J. Appl. Phys., Vol. 47, No. 6, p. 4803, 2008   DOI   ScienceOn
14 S. Pisana, M. Cantoro, A. Parvez, S. Hofmann, A. C. Ferrari, and J. Robertson, 'The role of precursor gases on the surface restructuring of catalyst films during carbon nanotube growth', Physica E, Vol. 37, p. 1, 2007   DOI   ScienceOn
15 G. Zhang, P. Qi, X. Wang, Y. Lu, X. Li, R. Tu, S. Bangsaruntip, D. Mann, L. Zhang, and H. Dai, 'Selective etching of metallic carbon nanotubes by gas-phase reaction', Science, Vol. 314, p. 974, 2006   DOI   ScienceOn
16 M. Chen, C. M. Chen, S. C. Shi, and C. F. Chen, 'Low-temperature synthesis of multiwalled carbon nanotubes by microwave plasma chemical vapor deposition using $CH_4-CO_2$ gas mixture', Jpn. J. Appl. Phys., Vol. 42, p. 614, 2003   DOI   ScienceOn
17 S. Hofmann, C. Ducati, J. Robertson, and B. Kleinsorge, 'Low-temperature growth of carbon nanotubes by plasma-enhanced chemical vapor deposition', Appl. Phys. Lett., Vol. 83, No. 1, p. 135, 2003   DOI   ScienceOn
18 Y. S. Min, E. J. Bae, B. S. Oh, D. Kang, and W. Park, 'Low-temperature growth of single-walled carbon nanotubes by water plasma chemical vapor deposition', J. Am. Chem. Soc., Vol. 127, p. 12498, 2005   DOI   ScienceOn
19 E. J. Bae, Y. S. Min, U. J. Kim, and W. Park, 'Thin film transistors of single- walled carbon nanotubes grown directly on glass substrates', Nanotechnology, Vol. 18, p. 495203, 2007   DOI   ScienceOn
20 S. Hofmann, C. Ducati, B. Kleinsorge, and J. Robertson, 'Direct growth of aligned carbon nanotube field emitter arrays onto plastic substrates', Appl. Phys. Lett., Vol. 83, No. 22, p. 4661, 2003   DOI   ScienceOn
21 M. Cantoro, S. Hofmann, S. Pisana, V. Scardaci, A. Parvez, C. Ducati, A. C. Ferrari, A. M. Blackburn, K. Y. Wang, and J. Robertson, 'Catalytic chemical vapor deposition of single-wall carbon nanotubes at low temperatures', Nano Lett., Vol. 6, No. 6, p. 1107, 2006   DOI   ScienceOn
22 E. J. Bae, Y. S. Min, D. Kang, J. H. Ko, and W. Park, 'Low-temperature growth of sngle-walled carbon nanotubes by plasma enhanced chemical vapor deposition', Chem. Mater., Vol. 17, p. 5141, 2005   DOI   ScienceOn
23 D. S. Bethune, C. H. Kiang, M. S. de Vries, G. Gorman, R. Savoy, J. Vazquez, and R. Beyers, 'Cobalt-catalysed growth of carbon nanotubes with single-atomic-layer walls', Nature, Vol. 363, p. 605, 1993   DOI   ScienceOn
24 H. Dai, A. G. rinzler, P. Nikolaev, A. Thess, D. T. Colbert, and R. E. Smalley, 'Single- wall nanotubes produced by metal-catalyzed disproportionation of carbon monoxide', Chem. Phys. Lett., Vol. 260, p. 471, 1996   DOI   ScienceOn
25 T. Hiraoka, T. Yamada, K. Hata, D. N. Futaba, H. Kurachi, S. Uemura, M. Yumura, and S. Iijima, 'Synthesis of single- and double-walled carbon nanotube forests on conducting metal foils', J. Am. Chem. Soc., Vol. 128, p. 13338, 2006   DOI   ScienceOn
26 M. Paradise and T. Goswami, 'Carbon nanotubes - production and industrial applications', Mater. Design, Vol. 28, p. 1477, 2007   DOI   ScienceOn
27 H. Dai, J. Kong, C. Zhou, N. Franklin, T. Tombler, A. Cassell, S. Fan, and M. Chapline, 'Controlled chemical routes to nanotube architectures, physics, and devices', J. Phys. Chem. B, Vol. 103, p. 11246, 1999   DOI   ScienceOn
28 Y. Li, D. Mann, M. Rolandi, W. Kim, A. Ural, S. Hung, A. Javey, J. Cao, D. Wang, E. Yenilmez, Q. Wang, J. F. Gibbons, Y. Nishi, and H. Dai, 'Preferential growth of semiconducting single-walled carbon nanotubes by a plasma enhanced CVD method', Nano Lett., Vol. 4, No. 2, p. 317, 2004   DOI   ScienceOn
29 H. Dai, 'Carbon nanotubes: synthesis, integration, and properties', Acc. Chem. Res. Vol. 35, p. 1035, 2002   DOI   ScienceOn