A Study on Characteristics of Microcrystalline-silicon Films Fabricated by PECVD Method |
Lee, Ho-Nyeon
(순천향대학교 전자정보공학과)
Lee, Jong-Ha (순천향대학교 전자정보공학과) Lee, Byoung-Wook (순천향대학교 전자정보공학과) Kim, Chang-Kyo (순천향대학교 전자정보공학과) |
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