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http://dx.doi.org/10.4313/JKEM.2008.21.9.808

Optical and Mechanical Properties of Diamond-like Carbon Film with Variation of Carbon Ratio  

Yun, Deok-Yong (성균관대학교 정보통신공학부)
Park, Yong-Seob (성균관대학교 정보통신공학부)
Choi, Won-Seok (한밭대학교 전기공학과)
Hong, Byung-You (성균관대학교 정보통신공학부)
Publication Information
Journal of the Korean Institute of Electrical and Electronic Material Engineers / v.21, no.9, 2008 , pp. 808-811 More about this Journal
Abstract
Optical and mechanical properties of diamond-like carbon (DLC) films synthesized by RF plasma enhanced chemical vapor deposition were investigated as a function the C/H ratio in gas mixture. The C/H ratio was varied from 6 to 10 %, adjusting the amount of $CH_4$ and $H_2$ as the source gas. The optical and mechanical properties of DLC films were characterized by UV spectrometer, Ellipsometer and Nano-indenter. The change of the C/H ratio during synthesis of DLC films had many effects on the growth rate, transmittance, refractive index and hardness. The growth rate of the films increased exponentially with the increase in C/H ratio. The hardness of the films showed the tendency to improve with increasing C/H ratio, whereas the transmittance decreased. The refractive index was varied from 2.03 to 2.17, and these refractive indexes close to 2.0 indicates that it can be applied to Si-based solar cell.
Keywords
Diamond-like carbon; Anti-reflection coating; Solar cell; Carbon ratio;
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Times Cited By KSCI : 2  (Citation Analysis)
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