Influence of Residual Oxygen on the growth of AlN Thin Films with Substrate Temperature |
Kim, Byoung-Kyun
(성균관대학교 정보통신공학부)
Lee, Eul-Tack (성균관대학교 정보통신공학부) Kim, Eung-Kwon (성균관대학교 정보통신공학부) Jeong, Seok-Won (성균관대학교 정보통신공학부) Roh, Yong-Han (성균관대학교 정보통신공학부) |
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