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http://dx.doi.org/10.4313/JKEM.2008.21.11.977

Properties of the Various Power Ratio in GZOB/AU Multilayers  

Lee, Jong-Hwan (성균관대학교 정보통신공학부)
Yu, Hyun-Kyu (성균관대학교 정보통신공학부)
Lee, Kyu-Il (성균관대학교 정보통신공학부)
Lee, Tae-Yong (성균관대학교 정보통신공학부)
Kang, Hyun-Il (성균관대학교 정보통신공학부)
Kim, Eung-Kwon (특허청 정보통신 심사국)
Song, Joon-Tae (성균관대학교 정보통신공학부)
Publication Information
Journal of the Korean Institute of Electrical and Electronic Material Engineers / v.21, no.11, 2008 , pp. 977-980 More about this Journal
Abstract
We investigated the effects of power ratio on the electrical and optical properties of Au based Ga-, B- codoped ZnO(GZOB) thin films. GZOB thin films were deposited on Au based poly carbonate(PC) substrate with various power in the range from 60 to 120 W by DC magnetron sputtering. In the result, GZOB films at 100 W exhibited a low resistivity value of $1.12\times10^{-3}\Omega-cm$, and a visible transmission of 80 % with a thickness of 300 nm. This result indicated that the addition of Ga and B in ZnO films leads to the improvement of conductivity and transparent. From the result, we can confirm the possibility of the application as transparent conductive electrodes.
Keywords
GZOB; Multilayer; Au; DC magnetron sputtering; Power ratio;
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Times Cited By KSCI : 1  (Citation Analysis)
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