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http://dx.doi.org/10.4313/JKEM.2008.21.11.973

Electrical Properties of Diamond-like Carbon Thin Film synthesized by PECVD  

Choi, Won-Seok (한밭대학교 전기공학과)
Park, Mun-Gi (LG 디스플레이)
Hong, Byung-You (성균관대학교 정보통신공학부)
Publication Information
Journal of the Korean Institute of Electrical and Electronic Material Engineers / v.21, no.11, 2008 , pp. 973-976 More about this Journal
Abstract
In addition to its similarity to genuine diamond film, diamond-like carbon (DLC) film has many advantages, including its wide band gap and variable refractive index. In this study, DLC films were prepared by the RF PECVD (Plasma Enhanced Chemical Vapor Deposition) method on silicon substrates using methane ($CH_4$) and hydrogen ($H_2$) gas. We examined the effects of the RF power on the electrical properties of the DLC films. The films were deposited at several RF powers ranging from 50 to 175 W in steps of 25 W. The leakage current of DLC films increased at higher deposition RF power. And the resistivities of DLC films grown at 50 W and 175 W were $5\times10^{11}$ ${\Omega}cm$ and $2.68\times10^{10}$ ${\Omega}cm$, respectively.
Keywords
DLC(Diamond-like carbon); PECVD(Plasma enhanced vapor deposition); Electrical properties;
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