A Study on Pad Profile Variation using Kinematical Analysis on Swing Arm Conditioner |
Oh, Ji-Heon
(부산대학교 기계공학과 정밀기계공학 CMP LAB.)
Lee, Sang-Jik (부산대학교 기계공학과 정밀기계공학 CMP LAB.) Lee, Ho-Jun (부산대학교 기계공학과 정밀기계공학 CMP LAB.) Cho, Han-Chul (부산대학교 기계공학과 정밀기계공학 CMP LAB.) Lee, Hyun-Seop (부산대학교 기계공학과 정밀기계공학 CMP LAB.) Kim, Hyoung-Jae (한국생산기술연구원 초정밀복합가공팀) Jeong, Hae-Do (부산대학교 기계공학과 정밀기계공학 CMP LAB.) |
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