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http://dx.doi.org/10.4313/JKEM.2008.21.10.923

Physical Properties of ITO/PVDF as a function of Oxygen Partial Pressure  

Le, Sang-Yub (한국과학기술연구원 재료기술연구본부)
Kim, Ji-Hwan (한국과학기술연구원 재료기술연구본부)
Park, Dong-Hee (한국과학기술연구원 재료기술연구본부)
Byun, Dong-Jin (고려대학교 재료공학과)
Choi, Won-Kook (한국과학기술연구원 재료기술연구본부)
Publication Information
Journal of the Korean Institute of Electrical and Electronic Material Engineers / v.21, no.10, 2008 , pp. 923-929 More about this Journal
Abstract
On the piezoelectric polymer, PVDF (poly vinylidene fluoride), the transparent conducting oxide (TCO) electrode material thin film was deposited by roll to roll sputtering process mentioned as a mass product-friendly process for display application. The deposition method for ITO Indium Tin Oxides) as our TCO was DC magnetron sputtering optimized for polymer substrate with the low process temperature. As a result, a high transparent and good conductive ITO/PVDF film was prepared. During the process, especially, the gas mixture ratio of Ar and Oxygen was concluded as an important factor for determining the film's physical properties. There were the optimum ranges for process conditions of mixture gas ratio for ITO/PVDF From these results, the doping mechanism between the oxygen atom and the metal element, Indium or Tin was highly influenced by oxygen partial pressure condition during the deposition process at ambient temperature, which gives the conductivity to oxide electrode, as generally accepted. With our studies, the process windows of TCO for display and other application can be expected.
Keywords
Piezoelectric polymer; Poly vinylidene fluoride; Transparent conducting oxide; Vacuum deposition; Gas mixture;
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Times Cited By KSCI : 2  (Citation Analysis)
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1 Y. Leterrier, L. Medico, F. Demarco, J.-A. Manson, U. Betz, M. F. Escola, M. Kharrazi Olsson, and F. Atamny, "Mechanical integrity of transparent conductive oxide films for flexible polymer-based displays", Thin solid Films, Vol. 460, p. 156, 2004   DOI   ScienceOn
2 A. Dodabalapur, "Organic and polymer transistors for electronics", Doda, Materialstoday, 9(4), p. 24, 2006
3 R. A. Street, W. S. Wong, S. E. Ready, M. L. Chabinyc, A. C. Arias, S. Limb, A. Salleo, and R. Lujan, "Jet printing flexible displays", Doda, Materialstoday, 9(4), p. 32, 2006
4 J. Jang, "Displays develop a new flexibility", Doda, Materialstoday, 9(4), p. 46, 2006
5 G. P. Crawford, "Flexible Flat Panel Displays", G. P. Crawford eds. John Wily & Sons, New York, 2005
6 H. W. Choi, D. H. Park, J. H. Kim, W. K. Choi, Y. J. Sohn, B. S. Song, J. Cho, and Y. S. Kim, "300 mm wide vacuum web coater system with surface modification for flexible copper clad laminate", Kor. Vac. Soc., Vol. 16, No. 2, p. 79, 2007   과학기술학회마을   DOI   ScienceOn
7 K. L. Chopra, S. Major, and D. K. Pandya, "Transparent conductors - A status review", Thin Solid Films, Vol. 102, No. 1, p. 1, 1983   DOI   ScienceOn
8 S. E. Dyer, P. S. Amons, O. J. Gregory, and A. Bruins Slot, "Preparation and piezoresistive properties of reactively sputtered indium tin oxide thin films", Thin Solid Films, Vol. 288, No. 1, p. 279, 1996   DOI   ScienceOn
9 L. Bardos and M. Libra, "Effect of the oxygen absorption on properties of ITO layers", Vacuum, Vol. 39, No. 1, p. 33, 1989   DOI   ScienceOn
10 Y. G. Han, "Indium tin oxide thin film deposition by a ion beam sputtering system", Master Thesis, Korea University, 2000
11 J. L. Vossen, "RF sputtered transparent conductors, The system $In_{2}O_{3}-SnO_{2}$ ", RCA Review, Vol. 32, p. 289, 1971
12 Y. Higuchi, "Low resistivity ITO film prepared by DC magnetron sputtering", Vol. 43, No. 2, p. 77, 1992
13 S. Y. Ie, D. H. Park, and W. K. Choi, "Audible OLED Device on Flexible PVDF Substrate with Laser Patterned ITO electrode", SID 08 DIGEST, p. 1575, 2008
14 W. Wu and B. Chiou, "Deposition of indium tin oxide films on polycarbonate substrates by radio-frequency magnetron sputtering", Thin solid Films, Vol. 298, p. 221, 1997   DOI   ScienceOn
15 J. H. Kim, D. H. Park, J. H. Kim, D. J. Byun, and W. K. Choi, "Characteristics of large area ITO/PET fabricated by vacuum web coater", Kor. J. Mater. Res., Vol. 17, No. 10, p. 516, 2007   과학기술학회마을   DOI   ScienceOn
16 T. Furukawa, Y. uematsu, K. Asakawa, and Y. Wada, "Piezoelectricity, pyroelectricity, and thermoelectricity of polymer films", J. Appl. Polymer Science, Vol, 12, p. 2675, 1968   DOI