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http://dx.doi.org/10.4313/JKEM.2007.20.8.685

Design and Characteristics of a Monolithic Inchworm Type Actuator(MITA)  

Kang, Hyung-Won (전자부품연구원 전자소재패키징연구센터)
Choi, Yong-Jun (전자부품연구원 전자소재패키징연구센터)
Lee, Hyeung-Gyu (전자부품연구원 전자소재패키징연구센터)
Publication Information
Journal of the Korean Institute of Electrical and Electronic Material Engineers / v.20, no.8, 2007 , pp. 685-690 More about this Journal
Abstract
The new design of inchworm-type piezoelectric actuator is presented in this paper, Compared to conventional inchworm-type actuators, which are composed of more than three piezoelectric bodies, we can reduce the number of piezoelectric bodies by employing the proposed design, resulting in only one piezoelectric body. The overall size of the proposed actuator which consists of one piezoelectric body, two clamping parts and one extending part, is only $5{\times}6{\times}9 [mm^3]$ (DWL). The actuating characteristics of fabricated Monolithic Inchworm Type Actuator(MITA), were found to be a displacement of $0.3{\mu}m$, a generating force of 0.6N and an electric power of 0.5W.
Keywords
Monolithic; Inchworm; Multilayer; Piezoelectric actuator;
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