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http://dx.doi.org/10.4313/JKEM.2007.20.3.213

Planarizaiton of Cu Interconnect using ECMP Process  

Jeong, Suk-Hoon (부산대학교 정밀기계공학과)
Seo, Heon-Deok (부산대학교 정밀기계공학과)
Park, Boum-Young (부산대학교 정밀기계공학과)
Park, Jae-Hong (부산대학교 정밀기계공학과)
Jeong, Hae-Do (부산대학교 정밀정형 및 금형가공 연구소)
Publication Information
Journal of the Korean Institute of Electrical and Electronic Material Engineers / v.20, no.3, 2007 , pp. 213-217 More about this Journal
Abstract
Copper has been used as an interconnect material in the fabrication of semiconductor devices, because of its higher electrical conductivity and superior electro-migration resistance. Chemical mechanical polishing(CMP) technique is required to planarize the overburden Cu film in an interconnect process. Various problems such as dishing, erosion, and delamination are caused by the high pressure and chemical effects in the Cu CMP process. But these problems have to be solved for the fabrication of the next generation semiconductor devices. Therefore, new process which is electro-chemical mechanical polishing(ECMP) or electro-chemical mechanical planarization was introduced to solve the technical difficulties and problems in CMP process. In the ECMP process, Cu ions are dissolved electrochemically by the applying an anodic potential energy on the Cu surface in an electrolyte. And then, Cu complex layer are mechanically removed by the mechanical effects between pad and abrasive. This paper focuses on the manufacturing of ECMP system and its process. ECMP equipment which has better performance and stability was manufactured for the planarization process.
Keywords
ECMP; Cu; Planarization;
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