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http://dx.doi.org/10.4313/JKEM.2007.20.2.162

Characteristics of ITO Thin Films prepared on PC Substrate  

Cho, Bum-Jin (경원대학교 전기공학과)
Kim, Kyung-Hwan (경원대학교 전기공학과)
Publication Information
Journal of the Korean Institute of Electrical and Electronic Material Engineers / v.20, no.2, 2007 , pp. 162-166 More about this Journal
Abstract
The ITO thin films were prepared by facing targets sputtering (FTS) system on polycarbonate (PC) substrate. The ITO thin films were deposited with a film thickness of 100 nm at room temperature. As a function of sputtering conditions, electrical and optical properties of prepared ITO thin films were measure. The electrical and optical characteristics of the ITO thin films were evaluted by Hall Effect Measurement (EGK) and UV/VIS spectrometer (HP), respectively. From the results, the ITO thin films was deposited with a resistivity $8{\times}10^{4}\;{\Omega}-cm$ and transmittance over 80 %.
Keywords
FTS; ITO; PC; OLED; Flexible;
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  • Reference
1 Y. Hoshi, H. Kato, and K. Funatsu, 'Structure and electrical properties of ITO thin films deposited at high rate by facing target sputtering', Thin Solid Films, Vol. 445, p. 245, 2003   DOI   ScienceOn
2 K. Ishibashi, K. Hirata, and N. Hosokawa, 'Mass spectrometric ion analysis in the sputtering of oxide targets', Journal of Vacuum Science & Technology A., Vol. 10, Iss. 4, p. 1718, 1992   DOI
3 K. Torninaga, T. Veda, T. Ao, A. Katkoka, and I. Mori, 'ITO films prepared by facing target sputtering system', Thin Solid Films, Vol. 281-282, p. 194, 1996
4 김건희, 금민종, 김한기, 손인환, 장경욱, 이원재, 최형욱, 박용서, 김경환, 'FTS법을 이용한 ITO 박막의 제작', 전기전자재료학회논문지, 17권, 11호, p. 1230, 2004
5 추혜용, 'Flexible OLED 기술 동향', 전기전자재료, 17권, 8호, p. 13, 2004
6 금민종, 김경환, '대향타겟스퍼터링법에 의한 FBAR용 AZO(ZnO:Al) 박막의 제작', 전지전자재료학회논문지, 17권, 4호, p. 442, 2004
7 금민종, 손인환, 최명규, 추순남, 최형욱, 신영화, 김경환, 'FBAR용 ZnO/$SiO_{2}$/Si 박막의 결정학적 특성에 관한 연구', 전지전자재료학회논문지, 16권, 8호, p. 711, 2003
8 김경환, 손인환, 금민종, '대향타겟식 스퍼터링에 의한 Co-Cr 박막의 제작', 전지전자재료학회논문지, 11권, 5호, p. 418, 1998