Fabrication of Li2CO3-doped Thin Film Bulk Acoustic Resonator and Structural, Electrical Properties as a Function of Annealing Temperatures
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Kim, Bong-Seok
(성균관대학교 정보통신공학과 전자소자응용연구실)
Kim, Eung-Kwon (성균관대학교 정보통신공학과 전자소자응용연구실) Lee, Tae-Yong (성균관대학교 정보통신공학과 전자소자응용연구실) Oh, Su-Young (성균관대학교 정보통신공학과 전자소자응용연구실) Song, Joon-Tae (성균관대학교 정보통신공학과 전자소자응용연구실) |
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