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http://dx.doi.org/10.4313/JKEM.2006.19.6.552

Characteristics of Amorphous IZO Anode Films for Polymer OLEDs Grown by Box Cathode Sputtering  

Moon Jong-Min (국립금오공과대학교 신소재시스템공학부)
Bae Jung-Hyeok (국립금오공과대학교 신소재시스템공학부)
Jung Soon-Wook (국립금오공과대학교 신소재시스템공학부)
Kim Han-Ki (국립금오공과대학교 신소재시스템공학부)
Publication Information
Journal of the Korean Institute of Electrical and Electronic Material Engineers / v.19, no.6, 2006 , pp. 552-557 More about this Journal
Abstract
Electrical, optical, surface, and structural properties of amorphous indium-zinc-oxide (a-IZO) grown by box cathode sputtering (BCS) were compared with crystalline indium-tin-oxide (c-ITO) anode films grown by conventional DC sputtering (DCS). Although x-ray diffraction plot of BCS-grown IZO film shows amorphous structure, the optical and electrical properties of a-IZO is comparable to those of c-ITO film. In particular, BCS-grown IZO films shows very smooth surface without defects such as pin hole and cracks because most of the energy of the sputtered atoms was confined in high density plasma region in box cathode gun. Furthermore polymer organic light emitting diodes (POLED) with the a-IZO anode film shows better electrical properties than that of POLED with the c-ITO anode film due to high work function and smooth surface of a-IZO. This suggested that BCS-grown a-IZO film is promising anode materials substituting conventional c-ITO anode in OLED and flexible displays.
Keywords
Amorphous IZO; Box cathode sputtering (BCS); ITO; POLED; Anode; Flexible displays;
Citations & Related Records
Times Cited By KSCI : 1  (Citation Analysis)
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