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http://dx.doi.org/10.4313/JKEM.2006.19.5.450

Optical Properties of Hydrogenated Amorphous Chalcogenide Thin Films  

Nam Gi-Yeon (전남대학교 응용화학공학부)
Kim Jun-Hyung (전남대학교 응용화학공학부)
Cho Sung-June (전남대학교 응용화학공학부)
Lee Hyun-Yong (전남대학교 응용화학공학부)
Publication Information
Journal of the Korean Institute of Electrical and Electronic Material Engineers / v.19, no.5, 2006 , pp. 450-456 More about this Journal
Abstract
In this paper, we report the changes of morphology, transmittance and photoluminescence (PL) in hydrogenated amorphous $As_{40}Ge_{10}Se_{15}S_{35}$ thin films, thermally deposited at the vapor incidence angles (${\theta}$) of $0^{\circ},\;45^{\circ}\;and\;80^{\circ}$. The hydrogenation was carried out under the condition of a $H_2$ pressure ($P_H$) of 20 atm and an annealing temperature range, $T_{Anneal}$ of $150^{\circ}C{\sim}210^{\circ}C$. A columnar structures with an inclination angle of approximately $65{\sim}70^{\circ}$ was formed in $80^{\circ}$-deposited films and then the columnar was broken after hydrogenation. Transmittance increases with an increase of deposition angle and by the hydrogenation. In particular, a broad PL band on the extended region is observed in obliquely deposited films and it increases during the hydrogenation.
Keywords
Hydrogenation; AsGeSeS; Columnar structure; Photoluminescence; Oblique deposition;
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