Passivation of Silicon Oxide Film Deposited at Low Temperature by Annealing in Nitrogen Ambient |
Kim, Jun-Sik
(성균관대학교 전자전기공학과)
Chung, Ho-Kyoon ((주)삼성 SDI) Choi, Byoung-Deog ((주)삼성 SDI) Lee, Ki-Yong ((주)삼성 SDI) Yi, Jun-Sin (성균관대학교 전자전기공학과) |
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