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http://dx.doi.org/10.4313/JKEM.2006.19.11.1010

A Study on Tribological Properties of Diamond-like Carbon Thin Film for the Application to Solid Lubricant of MEMS Devices  

Choi, Won-Seok (성균관대학교 플라스마 응용 표면기술 연구센터)
Hong, Byung-You (성균관대학교 정보통신공학부)
Publication Information
Journal of the Korean Institute of Electrical and Electronic Material Engineers / v.19, no.11, 2006 , pp. 1010-1013 More about this Journal
Abstract
Hydrogenated Diamond-like carbon (DLC) films were Prepared by the radio frequency plasma enhanced chemical vapor deposition (RF PECVD) method on silicon substrates using methane $(CH_4)$ and hydrogen $(H_2)$ gas for the application to solid lubricant of MEMS devices. We have checked the influence of varying RF power on tribological properties of DLC film. We have checked their performance as two kinds of method such as FFM (Friction Force Microscope) and BOD (Ball-on Disk) measurement. The friction coefficients and the contact number of cycles to steady state decreased as the increase of RF power with FFM and BOD measurement, respectively.
Keywords
DLC(Diamond-like carbon); PECVD(Plasma enhanced vapor deposition); BOD(Ball-on disk); MEMS(Micro electro mechanical system); FFM(Friction force microscope);
Citations & Related Records
Times Cited By KSCI : 2  (Citation Analysis)
연도 인용수 순위
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