Preparation AZO(ZnO:Al) Thin Film for FBAR. by FTS Method |
금민종
(경원대학교 전기정보공학과)
김경환 (경원대학교 전기정보공학과) |
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대향타켓식 스피터링에 의한 Co-Cr 박막의 제작
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과학기술학회마을 |
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Prezoelectric ZnO transducers produced by r.f magnetion sputtering
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Thin film of high resistivity zinc oxide produced by a modified CVD method
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DOI ScienceOn |
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Influence of oxygen partial pressure on transparency and condductivity of RF sputtered Al-doped ZnO thin film
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FBAR용 ZnO/SiO₂/Si 박막의 결정학적 특성에 관한 연구
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과학기술학회마을 |
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Influence of oxygen partial pressure on transparency and conductibvity of RF sputtered Al-doped ZnO thin film
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Optical properties of single-crystalline ZnO smoothly chemical vapor deposited on immediately sputtered thin ZnO film on sapphire
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DOI ScienceOn |
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Thin Film Properties by Facing Targets Sputtering System
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