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http://dx.doi.org/10.4313/JKEM.2004.17.12.1277

Electrical and Optical Properties of ITO Thin films Prepared on the PET Substrate  

Song, Woo-Chang (삼척대학교 전기제어공학부)
Publication Information
Journal of the Korean Institute of Electrical and Electronic Material Engineers / v.17, no.12, 2004 , pp. 1277-1282 More about this Journal
Abstract
ITO films on PET substrate were prepared by DC magnetron sputtering method using powdery target with different deposition conditions. In addition, the electrical and optical properties were investigated. As the sputtering power and working pressure were higher, the resistvity of ITO films increased. The optical transmittance deteriorated with increasing sputtering power and thickness. As the working pressure increased, however, the optical transmittance improved at visible region of light. From these results, we could deposited ITO films with 8${\times}$10$^{-3}$ $\Omega$-cm of resistivity and 80 % of transmittance at optimal conditions.
Keywords
ITO; TCO; Sputtering; PET substrate; Electrical property; Optical property;
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