Browse > Article
http://dx.doi.org/10.4313/JKEM.2004.17.12.1271

Dry-etch Characteristics of InP/InGaAsP Photonic Crystal Structure  

Lee, Ji-Myon (국립순천대학교 재료금속공학과)
Publication Information
Journal of the Korean Institute of Electrical and Electronic Material Engineers / v.17, no.12, 2004 , pp. 1271-1276 More about this Journal
Abstract
Two-dimensionally arrayed nanocolumn lattices were fabricated by using double-exposure laser holographic method. The hexagonal lattice was formed by rotating the sample with 60 degree while the square lattice by 90 degree before the second laser-exposure. The reactive ion etching for a typical time of 30 min using CH$_4$/H$_2$ plasma enhanced the aspect-ratio by more than 1.5 with a slight increase of the bottom width of columns. The etch-damage was observed by photoluminescence (PL) spectroscopy which was removed by the wet chemical etching using HBr/$H_2O$$_2$/$H_2O$ solution, leading into the enhanced PL intensities of the PCs.
Keywords
Photonic crystal; RIE; InP; Nanofabrication; Damage removal;
Citations & Related Records
연도 인용수 순위
  • Reference
1 E. Yablonovitch, 'Photonic band-gap structures', J. Opt. Soc. Am. B, Vol. 10, No. 2, p. 283, 1993   DOI
2 C. A. Mack, 'Development of positive photoresists', J Electronchem. Soc., Vol. 134, No.1, p. 148, 1987   DOI   ScienceOn
3 B. A. Mello, 1. F. da Costa, C. R. A. Lima, and L. Cescato, 'Developed profile of holographically exposed photoresist gratings', Appl. Optics, Vol. 34, No.4, p. 597, 1995   DOI
4 J M. Lee, S. H. Oh, C. W. Lee, H. Ko, S. Park, K. S. Kim, and M. H. Park, 'Fabrication InGaAsP/lnP two-dimensional periodic nanostructure with variable sizes and periods using laser holography and reactive ion etching', Electrochem. Solidstate Lett., Vol. 7, No.1, p. 11, 2004
5 김성대, 정석용, 이병택, 허종수, 'BC13/H2/Ar유도결합 플리즈마를 이용한 GaN의 건식식각특성', 전기전자재료학회논문지, 10권 3호, p.179,2000
6 백인규, 임완태, 이제원, 조관식 'BC13/Ne 혼합가스를 이용한 III-V 반도체의 고밀도 유도결합 플리즈마 식각', 전기전자재료학회논문지, 16권,12S호, p 1187, 2003
7 I. Adesida, K. Nummila, E. Andideh, J.Hughes, C. Caneau, B. Bhat, and R.Holmstrom, 'Nanostructure fabrication in InP and related compounds', J. Vac. Sci.Technol. B, Vol. 8, No.6, p. 1357, 1990   DOI
8 D. M. Manos and D. L. Flamm, "Plasma Etching, an Introduction", D. M. Manos and D.L. Flamm, Ed., Academic press, p. 138, 1989
9 E. Chow, S. Y. Lin, S. G. Johnson, P. R. Villeneuve, J. D. Joannopoulos, J. R. Wendt, G. A. Vawter, W. Zubrzycki, H. Hou, and S. Alleman, 'Three-dimensional control of light in a two-dimensional photonic crystal slab', Nature, Vol. 407, No. 6807, p. 983, 2000   DOI   ScienceOn
10 T. Ohira, T. Segawa, K. Nagai, K. Utaka, and M. Nakao, 'Large area InP submicron two-dimensional (2D) periodic structures fabricated by two-time laser holography', Jpn. J Appl. Phys., Vol. 41, No. 2B, p. 1085, 2002   DOI
11 S. C. Kitson, W. L. Barnes, and J R. Sambles, 'The fabrication of submicron hexagonal arrays using multiple-exposure optical interferometry', IEEE Photon. Technol. Lett., Vol. 8, No. 12, p. 1662, 1996   DOI   ScienceOn
12 S. W. Pang, 'Handbook of Advanced Plasma Processing Techniques', R. J. Shul and S. J. Pearton, Ed., Springer, p. 344, 2000
13 T. F. Krauss, 'Photonic Crystals and Light Localizaion in the 21st Century', C. M. Soukoulis, Ed., Kluwer Academic Publishers, p. 131, 2001
14 B. Corbett and W. M. Kelly, 'Surface recombination in dry etched AlGaAs/GaAs double heterostructures p-i-n mesa diode', Appl. Phys, Lett., Vol. 62, No.1, p. 87, 1993   DOI   ScienceOn
15 강명구, 김경태, 김창일, '유도결함 플리즈마에 의해 식각된 PZT 박막의 식각 damage 개선', 전기전자재료학회 논문지,14권 7호, p551.2001
16 T. Baba and T. Matsuzaki, 'Fabrication and photoluminescence studies of GaInAsP/InP2-dimensional photonic crystals', Jpn. J.Appl, Phys., Vol. 35, No. 2B, p. 1348, 1996   DOI