Formation of Dielectric Carbon Nitride Thin Films using a Pulsed Laser Ablation Combined with High Voltage Discharge Plasma |
김종일 (한국기술교육대학교 정보기술공학부) |
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Growth and composition of covalent carbon nitride solids
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DOI ScienceOn |
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Reactive pulsed laser deposition of CNx films
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DOI ScienceOn |
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Low compressibility carbon nitride
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DOI ScienceOn |
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Structural properties of amorphous carbon nitride films prepared by reactive RF-magnetron sputtering
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DOI ScienceOn |
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Growth and properties of carbon nitride thin films
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Si-containing crystalline carbon nitride dervied from microwave plasma enhanced chemical vapor deposition
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DOI ScienceOn |
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반응성 스퍼터링으로 성장된 결정성 질화탄소막의 기계적 특성
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과학기술학회마을 DOI ScienceOn |
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Carbon nitride films synthesized by NH₃-ion-beam-assisted
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DOI ScienceOn |
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Synthesis of C₃N₄crystals under high pressure and high temperature
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DOI ScienceOn |
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Carbon nitride deposited using energetic species: A tow-phase system
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DOI ScienceOn |
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Synthesis of crystalline carbon nitride
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결정질 질화탄소 박막의 합성과 그 특성해석
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과학기술학회마을 |
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질화탄소 박막 증착 시 고전압 방전 플라즈마에 가한 자장의 영향
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과학기술학회마을 DOI ScienceOn |