Browse > Article
http://dx.doi.org/10.4313/JKEM.2003.16.1.083

Enhancement of Q Factor in Parallel-Branch Spiral Inductors  

서동우 (한국전자통신연구원 정보저장소자팀)
민봉기 (한국전자통신연구원 정보저장소자팀)
강진영 (한국전자통신연구원 정보저장소자팀)
백문철 (한국전자통신연구원 정보저장소자팀)
Publication Information
Journal of the Korean Institute of Electrical and Electronic Material Engineers / v.16, no.1, 2003 , pp. 83-87 More about this Journal
Abstract
In the present paper we suggested a parallel branch structure of aluminum spiral inductor for the use of RF integrated circuit at 1∼3 GHz. The inductor was implemented on p-type silicon wafer (5∼15Ω-cm) under the standard CMOS process and it showed a enhanced qualify(Q) factor by more than 10 % with no degradation of inductance. The effect of the structure modification on the Q factor and the inductance was scrutinized comparing with conventional spital inductors
Keywords
Spiral Inductor; Qualify factor; Inductance;
Citations & Related Records
Times Cited By KSCI : 4  (Citation Analysis)
연도 인용수 순위
1 On-chip spiral inductors with patterned ground shields for Si-based RFICs /
[ C. Patrick Yue;S. Simon Wong ] / IEEE J. of Solid-State Circuits   DOI   ScienceOn
2 Design of planar rectangular microelectronic inductors /
[ H. M. Greenhouse ] / IEEE Trans. on Parts, Hybrids, and Packaging
3 솔레노이드 형태의 RF 칩 인덕터에 대한 연구 /
[ 김재욱;윤의중;정영창;홍철호 ] / 한국전기전자재료학회논문지   과학기술학회마을
4 RF circuit design aspects of spiral inductors on silicon /
[ Joachim N. Burghartz;D. C. Edelstein;Mehmet Soyuer;H. A. Ainspan;Keith A. Jenkins ] / IEEE J. of Solid-State Circuits   DOI   ScienceOn
5 습식 식각법으로 제조된 박막 인덕터의 임피던스 특성 /
[ 김현식;송재성;오영우 ] / 한국전기전자재료학회논문지   과학기술학회마을
6 DC-DC Converter용 자성박막 인덕터 설계에 관한 연구 /
[ 김종대;김상기;김좌연;윤의중;박노경 ] / 한국전기전자재료학회논문지   과학기술학회마을
7 Integrated RF components in a SiGe bipolar technology /
[ Joachim N. Burghartz;Mehmet Soyuer;Keith A. Jenkins;Michael Kies;Margaret Dolan;Kenneth J. Stein;John Malinowski;David L. Harame ] / IEEE J. of Solid-State Circuits   DOI   ScienceOn
8 Multilevel monolithic inductors in silicon technology /
[ M. Soyuer;J. N. Burghartz;K. A. Jenkins;S. Ponnapalli;J. F. Ewen;W. E. Pence ] / Electronics Lett.   DOI   ScienceOn