Fabrication of 3-Dimensional Microstructures for Bulk Micromachining by SDB and Electrochemical Etch-Stop |
정귀상
(동서대학교 정보시스템공학부)
김재민 (동서대학교 정보시스템공학부) 윤석진 (한국과학기술연구원 박막기술연구센터) |
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A pressure-balanced electro-statically actuated microvalve
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A monolithic silicon accelerometer with integral air damping and over-range protection
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3 |
Fabrication of SOI wafers with buried cavities using silicon fusion bonding and electrochemical etchback
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DOI ScienceOn |
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Electrochemical etch-stop characteristics of TMAH/IPA/pyrazine solutions
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5 |
A study on electrochemical etch-stop in TMAH/IPA/pyrazine solutions
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6 |
A study on pre-bonding according to HF pre-treatment conditions in Si wafer direct bonding
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7 |
A computer controlled polishing system for silicon-on-insulator
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MOSFET's on silicon prepared by moving melt zone recrystallization of encapsulated poly-crystalline silicon on an insulating substrate
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Multiple SOI structure fabricated by high dose oxygen implantation and epitaxial growth
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DOI |
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An investigation of the electrochemical etching of (100)silicon in CsOH and KOH
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11 |
Investigation of buried etch stop layer in silicon made by nitrogen implantation
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DOI |
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Epitaxial <TEX>$Al_2O_3$</TEX> films on Si low-pressure chemical vapor deposition
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DOI |
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14 |
Formation of interface bubbles in bonded silicon wafer : a thermodynamic model
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