Wafer Level Packaging of RF-MEMS Devices with Vertical Feed-through |
Park, Yun-Kwon
(한국과학기술연구원 마이크로시스템센터, 서울시립대학교 전자전기공학부)
Lee, Duck-Jung (한국과학기술연구원 마이크로시스템센터) Park, Heung-Woo (한국전자통신연구원 광통신소자연구부) kim, Hoon (한국과학기술연구원 마이크로시스템센터) Lee, Yun-Hi (한국과학기술연구원 마이크로시스템센터) Kim, Chul-Ju (서울시립대학교 전자전기공학부) Ju, Byeong-Kwon (한국과학기술연구원 마이크로시스템센터) |
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