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http://dx.doi.org/10.4313/JKEM.2002.15.10.883

A Study on Pre-bonding of 3C-SiC Wafers using CVD Oxide  

Shigehiro Nishino (Dept. of Electro,& Infor. Sci., Kyoto Institute of Technology)
Publication Information
Journal of the Korean Institute of Electrical and Electronic Material Engineers / v.15, no.10, 2002 , pp. 883-888 More about this Journal
Abstract
SiC direct bonding technology is very attractive for both SiCOI(SiC-on-insulator) electric devices and SiC-MEMS(micro electro mechanical system) fields because of its application possibility in harsh environments. This paper presents pre-bonding techniques with variation of HF pre-treatment conditions for SiC wafer direct bonding using PECVD(plasma enhanced chemical vapor deposition) oxide. The PECYD oxide was characterized by XPS(X-ray photoelectron spectrometer) and AFM(atomic force microscopy). The characteristics of the bonded sample were measured under different bonding conditions of HF concentration and an applied pressure. The bonding strength was evaluated by the tensile strength method. The bonded interface was analyzed by using SEM(scanning electron microscope). Components existed in the interlayer were analyzed by using FT-IR(fourier transform infrared spectroscopy). The bonding strength was varied with HF pre-treatment conditions before the pre-bonding in the range of 5.3 kgf/cm$^2$to 15.5 kgf/cm$^2$.
Keywords
3C-SiC; Pre-bending; CVD; SICOI; MEMS; XPS; AFM; FT-IR; SEM; Bonding strength;
Citations & Related Records
Times Cited By KSCI : 1  (Citation Analysis)
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