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http://dx.doi.org/10.9729/AM.2017.47.1.13

Understanding the Growth Kinetics of Graphene on Cu and Fe2O3 Using Inductively-Coupled Plasma Chemical Vapor Deposition  

Van Nang, Lam (Department of Materials Science and Engineering, Chungnam National University)
Kim, Dong-Ok (Department of Materials Science and Engineering, Chungnam National University)
Trung, Tran Nam (Department of Materials Science and Engineering, Chungnam National University)
Arepalli, Vinaya Kumar (Department of Materials Science and Engineering, Chungnam National University)
Kim, Eui-Tae (Department of Materials Science and Engineering, Chungnam National University)
Publication Information
Applied Microscopy / v.47, no.1, 2017 , pp. 13-18 More about this Journal
Abstract
High-quality graphene was synthesized on Cu foil and $Fe_2O_3$ film using $CH_4$ gas via inductively-coupled plasma chemical vapor deposition (ICPCVD). The graphene film was formed on $Fe_2O_3$ at a temperature as low as $700^{\circ}C$. Few-layer graphene was formed within a few seconds and 1 min on Cu and $Fe_2O_3$, respectively. With increasing growth time and plasma power, the graphene thickness was controllably reduced and ultimately self-limited to a single layer. Moreover, the crystal quality of graphene was constantly enhanced. Understanding the ICPCVD growth kinetics that are critically affected by ICP is useful for the controllable synthesis of high-quality graphene on metals and oxides for various electronic applications.
Keywords
Graphene; Chemical vapor deposition; Inductively-coupled plasma;
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1 Zhu M, Wang J, Holloway B C, Outlaw R A, Zhao X, Hou K, Shutthanandan V, and Manos D M (2007) A mechanism for carbon nanosheet formation. Carbon 45, 2229-2234.   DOI
2 Fanton M A, Robinson J A, Puls C, Liu Y, Hollander M J, Weiland B E, Labella M, Trumbull K, Kasarda R, Howsare C, Stitt J, and Snyder D W (2011) Characterization of graphene films and transistors grown on sapphire by metal-free chemical vapor deposition. ACS Nano 5, 8062-8069.   DOI
3 Ferrari A C, Meyer J C, Scardaci V, Casiraghi C, Lazzeri M, Mauri F, Piscanec S, Jiang D, Novoselov K S, Roth S, and Geim A K (2006) Raman spectrum of graphene and graphene layers. Phys. Rev. Lett. 97, 187401.   DOI
4 Geim A K and Novoselov K S (2007) The rise of graphene. Nat. Mater. 6, 183-191.   DOI
5 Gopichand N, Sergei R, and Raj S (2010) Remote plasma assisted growth of graphene films. Appl. Phys. Lett. 96, 154101.   DOI
6 Graf D, Molitor F, Ensslin K, Stampfer C, Jungen A, Hierold C, and Wirtz L (2007) Spatially resolved Raman spectroscopy of single-and few-layer graphene. Nano Lett. 7, 238-242.   DOI
7 Kim J, Ishihara M, Koga Y, Tsugawa K, Hasegawa M, and Iijima S (2011a) Low-temperature synthesis of large-area graphene-based transparent conductive films using surface wave plasma chemical vapor deposition. Appl. Phys. Lett. 98, 091502.   DOI
8 Kim Y, Song W, Lee S Y, Jeon C, Jung W, Kim M, and Park C Y (2011b) Low-temperature synthesis of graphene on nickel foil by microwave plasma chemical vapor deposition. Appl. Phys. Lett. 98, 263106.   DOI
9 Kuttel O M, Groening O, Emmenegger C, and Schlapbach L (1998) Electron field emission from phase pure nanotube films grown in a methane/hydrogen plasma. Appl. Phys. Lett. 73, 2113.   DOI
10 Lee B J, Lee T W, Park S, Yu H Y, Lee J O, Lim S H, and Jeong G H (2011) Low-temperature synthesis of thin graphite sheets using plasma-assisted thermal chemical vapor deposition system. Mater. Lett. 65, 1127-1130.   DOI
11 Li X S, Cai W W, An J H, Kim S, Nah J, Yang D X, Piner R, Velamakanni A, Jung I, Tutuc E, Banerjee S K, Colombo L, and Ruoff R S (2009a) Large-area synthesis of high-quality and uniform graphene films on copper foils. Science 324, 1312-1314.   DOI
12 Li X S, Zhu Y W, Cai W W, Borysiak M, Han B Y, Chen D, Piner R D, Colombo L, and Ruoff R S (2009b) Transfer of large-area graphene films for high-performance transparent conductive electrodes. Nano Lett. 9, 4359-4363.   DOI
13 Li Y M, Mann D, Rolandi M, Kim W, Ural A, Hung S, Javey A, Cao J, Wang D W, Yenilmez E, Wang Q, Gibbons J F, Nishi Y, and Dai H J (2004) Preferential growth of semiconducting single-walled carbon nanotubes by a plasma enhanced CVD method. Nano Lett. 4, 317-321.   DOI
14 Nandamuri G, Roumimov S, and Solanki R (2010) Remote plasma assisted growth of graphene films. Appl. Phys. Lett. 96, 154101.   DOI
15 Nang L V and Kim E T (2012) Controllable synthesis of high-quality graphene using inductively-coupled plasma chemical vapor deposition. J. Electrochem. Soc. 159, K93-K96.   DOI
16 Nang L V and Kim E T (2013) Low-temperature synthesis of graphene on Fe2O3 using inductively coupled plasma chemical vapor deposition. Mater. Lett. 92, 437-439.   DOI
17 Reina A, Jia X T, Ho J, Nezich D, Son H B, Bulovic V, Dresselhaus M S, and Kong J (2009) Large area, few-layer graphene films on arbitrary substrates by chemical vapor deposition. Nano Lett. 9, 3087.
18 Song H J, Son M, Park C, Lim H, Levendorf M P, Tsen A W, Park J, and Choi H C (2012) Large Scale metal-free synthesis of graphene on sapphire and transfer-free device fabrication. Nanoscale 4, 3050-3054.   DOI
19 Wang J, Zhu M, Outlaw R A, Zhao X, Manos D M, and Hollo-way B C (2004) Synthesis of carbon nanosheets by inductively coupled radio-frequency plasma enhanced chemical vapor deposition. Carbon 42, 2867.   DOI
20 Bae S, Kim H K, Lee Y B, Xu X F, Park J S, Zheng Y, Balakrishnan J, Lei T, Kim H R, Song Y, Kim Y J, Kim K S, Ozyilmaz B, Ahn J H, Hong B H, and Iijima S (2010) Roll-to-roll production of 30-inch graphene films for transparent electrodes. Nat. Nanotechnol. 5, 574-578.   DOI
21 Becerril H A, Mao J, Liu Z, Stoltenberg R M, Bao Z, and Chen Y (2008) Evaluation of solution-processed reduced graphene oxide films as transparent conductors. ACS Nano 2, 463-470.   DOI
22 Bi H, Sun S, Huang F, Xie X, and Jiang M (2012) Direct growth of few-layer graphene films on $SiO_2$ substrates and their photovoltaic applications. J. Mater. Chem. 22, 411-416.   DOI
23 Chen J, Wen Y, Guo Y, Wu B, Huang L, Xue Y, Geng D, Wang D, Yu G, and Liu Y (2011) Oxygen-aided synthesis of polycrystalline graphene on silicon dioxide substrates. J. Am. Chem. Soc. 133, 17548-175451.   DOI
24 Dato A, Radmilovic V, Lee Z, Phillips J, and Freklach M (2008) Substrate-free gas-phase synthesis of graphene sheets. Nano Lett. 8, 2012-2016.   DOI
25 de Heer W A, Berger C, Wu X, First P N, Conrad E H, Li X, Li T, Sprinkle M, Hass J, Sadowski M L, Potemski M, and Martinez G (2007) Epitaxial graphene. Solid State Commun. 143, 92-100.   DOI