Understanding the Growth Kinetics of Graphene on Cu and Fe2O3 Using Inductively-Coupled Plasma Chemical Vapor Deposition |
Van Nang, Lam
(Department of Materials Science and Engineering, Chungnam National University)
Kim, Dong-Ok (Department of Materials Science and Engineering, Chungnam National University) Trung, Tran Nam (Department of Materials Science and Engineering, Chungnam National University) Arepalli, Vinaya Kumar (Department of Materials Science and Engineering, Chungnam National University) Kim, Eui-Tae (Department of Materials Science and Engineering, Chungnam National University) |
1 | Zhu M, Wang J, Holloway B C, Outlaw R A, Zhao X, Hou K, Shutthanandan V, and Manos D M (2007) A mechanism for carbon nanosheet formation. Carbon 45, 2229-2234. DOI |
2 | Fanton M A, Robinson J A, Puls C, Liu Y, Hollander M J, Weiland B E, Labella M, Trumbull K, Kasarda R, Howsare C, Stitt J, and Snyder D W (2011) Characterization of graphene films and transistors grown on sapphire by metal-free chemical vapor deposition. ACS Nano 5, 8062-8069. DOI |
3 | Ferrari A C, Meyer J C, Scardaci V, Casiraghi C, Lazzeri M, Mauri F, Piscanec S, Jiang D, Novoselov K S, Roth S, and Geim A K (2006) Raman spectrum of graphene and graphene layers. Phys. Rev. Lett. 97, 187401. DOI |
4 | Geim A K and Novoselov K S (2007) The rise of graphene. Nat. Mater. 6, 183-191. DOI |
5 | Gopichand N, Sergei R, and Raj S (2010) Remote plasma assisted growth of graphene films. Appl. Phys. Lett. 96, 154101. DOI |
6 | Graf D, Molitor F, Ensslin K, Stampfer C, Jungen A, Hierold C, and Wirtz L (2007) Spatially resolved Raman spectroscopy of single-and few-layer graphene. Nano Lett. 7, 238-242. DOI |
7 | Kim J, Ishihara M, Koga Y, Tsugawa K, Hasegawa M, and Iijima S (2011a) Low-temperature synthesis of large-area graphene-based transparent conductive films using surface wave plasma chemical vapor deposition. Appl. Phys. Lett. 98, 091502. DOI |
8 | Kim Y, Song W, Lee S Y, Jeon C, Jung W, Kim M, and Park C Y (2011b) Low-temperature synthesis of graphene on nickel foil by microwave plasma chemical vapor deposition. Appl. Phys. Lett. 98, 263106. DOI |
9 | Kuttel O M, Groening O, Emmenegger C, and Schlapbach L (1998) Electron field emission from phase pure nanotube films grown in a methane/hydrogen plasma. Appl. Phys. Lett. 73, 2113. DOI |
10 | Lee B J, Lee T W, Park S, Yu H Y, Lee J O, Lim S H, and Jeong G H (2011) Low-temperature synthesis of thin graphite sheets using plasma-assisted thermal chemical vapor deposition system. Mater. Lett. 65, 1127-1130. DOI |
11 | Li X S, Cai W W, An J H, Kim S, Nah J, Yang D X, Piner R, Velamakanni A, Jung I, Tutuc E, Banerjee S K, Colombo L, and Ruoff R S (2009a) Large-area synthesis of high-quality and uniform graphene films on copper foils. Science 324, 1312-1314. DOI |
12 | Li X S, Zhu Y W, Cai W W, Borysiak M, Han B Y, Chen D, Piner R D, Colombo L, and Ruoff R S (2009b) Transfer of large-area graphene films for high-performance transparent conductive electrodes. Nano Lett. 9, 4359-4363. DOI |
13 | Li Y M, Mann D, Rolandi M, Kim W, Ural A, Hung S, Javey A, Cao J, Wang D W, Yenilmez E, Wang Q, Gibbons J F, Nishi Y, and Dai H J (2004) Preferential growth of semiconducting single-walled carbon nanotubes by a plasma enhanced CVD method. Nano Lett. 4, 317-321. DOI |
14 | Nandamuri G, Roumimov S, and Solanki R (2010) Remote plasma assisted growth of graphene films. Appl. Phys. Lett. 96, 154101. DOI |
15 | Nang L V and Kim E T (2012) Controllable synthesis of high-quality graphene using inductively-coupled plasma chemical vapor deposition. J. Electrochem. Soc. 159, K93-K96. DOI |
16 | Nang L V and Kim E T (2013) Low-temperature synthesis of graphene on Fe2O3 using inductively coupled plasma chemical vapor deposition. Mater. Lett. 92, 437-439. DOI |
17 | Reina A, Jia X T, Ho J, Nezich D, Son H B, Bulovic V, Dresselhaus M S, and Kong J (2009) Large area, few-layer graphene films on arbitrary substrates by chemical vapor deposition. Nano Lett. 9, 3087. |
18 | Song H J, Son M, Park C, Lim H, Levendorf M P, Tsen A W, Park J, and Choi H C (2012) Large Scale metal-free synthesis of graphene on sapphire and transfer-free device fabrication. Nanoscale 4, 3050-3054. DOI |
19 | Wang J, Zhu M, Outlaw R A, Zhao X, Manos D M, and Hollo-way B C (2004) Synthesis of carbon nanosheets by inductively coupled radio-frequency plasma enhanced chemical vapor deposition. Carbon 42, 2867. DOI |
20 | Bae S, Kim H K, Lee Y B, Xu X F, Park J S, Zheng Y, Balakrishnan J, Lei T, Kim H R, Song Y, Kim Y J, Kim K S, Ozyilmaz B, Ahn J H, Hong B H, and Iijima S (2010) Roll-to-roll production of 30-inch graphene films for transparent electrodes. Nat. Nanotechnol. 5, 574-578. DOI |
21 | Becerril H A, Mao J, Liu Z, Stoltenberg R M, Bao Z, and Chen Y (2008) Evaluation of solution-processed reduced graphene oxide films as transparent conductors. ACS Nano 2, 463-470. DOI |
22 |
Bi H, Sun S, Huang F, Xie X, and Jiang M (2012) Direct growth of few-layer graphene films on |
23 | Chen J, Wen Y, Guo Y, Wu B, Huang L, Xue Y, Geng D, Wang D, Yu G, and Liu Y (2011) Oxygen-aided synthesis of polycrystalline graphene on silicon dioxide substrates. J. Am. Chem. Soc. 133, 17548-175451. DOI |
24 | Dato A, Radmilovic V, Lee Z, Phillips J, and Freklach M (2008) Substrate-free gas-phase synthesis of graphene sheets. Nano Lett. 8, 2012-2016. DOI |
25 | de Heer W A, Berger C, Wu X, First P N, Conrad E H, Li X, Li T, Sprinkle M, Hass J, Sadowski M L, Potemski M, and Martinez G (2007) Epitaxial graphene. Solid State Commun. 143, 92-100. DOI |
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