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Measurement of Spherical Aberration Coefficient of the Objective Lens in KBSI-HVEM  

Kim, Young-Min (Division of Electron Microscopic Research, Korea Basic Science Institute)
Shim, Hyo-Sik (Technical Support Division, JEOL Korea Ltd.)
Kim, Youn-Joong (Division of Electron Microscopic Research, Korea Basic Science Institute)
Publication Information
Applied Microscopy / v.37, no.2, 2007 , pp. 111-121 More about this Journal
Abstract
Coefficient of spherical aberration of the objective lens in the KBSI-HVEM was evaluated by diffractogram method. Instrumental resolution was also discussed with this method. In order to improve the accuracy, digital processing and graphical curve fitting for intensity profile of diffractogram were employed. Experimental concerns where the optimal procedure of the measurement con be accomplished for this study were discussed. The spherical aberration coefficient $(C_s)$ was estimated to be $2.628{\pm}0.04\;mm$ from this study, which was almost coincident with the value of the manufacture's suggestion $(C_s=2.65\;mm)$.
Keywords
Spherical aberration coefficient; $C_s$; Objective lens; High voltage electron microscope (HVEM);
Citations & Related Records
Times Cited By KSCI : 1  (Citation Analysis)
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