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http://dx.doi.org/10.5229/JKES.2013.16.1.1

Silicon Nanostructures Fabricated by Metal-Assisted Chemical Etching of Silicon  

Oh, Ilwhan (Department of Applied Chemistry, Kumoh National Institute of Technology)
Publication Information
Journal of the Korean Electrochemical Society / v.16, no.1, 2013 , pp. 1-8 More about this Journal
Abstract
This review article summarizes metal-assisted chemical etching (MAC etch or MACE), an anisotropic etching method for Si, and describes principles, main factors, and recent achievements in literature. In 1990, it was discovered that, with metal catalyst on surface and $H_2O_2$/HF as etchant, Si substrate can be etched anisotropically, in even in solution. In contrast to high-cost vacuum-based dry etching methods, MAC etch enables to fabricate a variety of high aspect ratio nanostructures through wet etching process.
Keywords
Metal-assisted chemical etching; MAC etch; Si nanowire;
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1 X. G. Zhang, "Electrochemistry of Silicon and Its Oxide", Kluwer, New York (2001).
2 X. L. Li, 'Metal Assisted Chemical Etching for High Aspect Ratio Nanostructures: A Review of Characteristics and Applications in Photovoltaics', Curr. Opin. Sol. State & Mater. Sci., 16, 71 (2012).   DOI   ScienceOn
3 Z. P. Huang, N. Geyer, P. Werner, J. de Boor, and U. Gosele, 'Metal-Assisted Chemical Etching of Silicon: A Review', Adv. Mater., 23, 285 (2011).   DOI   ScienceOn
4 N. Geyer, B. Fuhrmann, Z. P. Huang, J. de Boor, H. S. Leipner, and P. Werner, 'Model for the Mass Transport during Metal-Assisted Chemical Etching with Contiguous Metal Films As Catalysts', J. Phys. Chem., C 116, 13446 (2012).   DOI   ScienceOn
5 K. Peng, Y. Yan, S. Gao, and J. Zhu, 'Dendrite-Assisted Growth of Silicon Nanowires in Electroless Metal Deposition', Adv. Funct. Mater., 13, 127 (2003).   DOI   ScienceOn
6 K. Tsujino and M. Matsumura, 'Boring Deep Cylindrical Nanoholes in Silicon Using Silver Nanoparticles as a Catalyst', Adv. Mater., 17, 1045 (2005).   DOI   ScienceOn
7 O. J. Hildreth, W. Lin, and C. P. Wong, 'Effect of Catalyst Shape and Etchant Composition on Etching Direction in Metal-Assisted Chemical Etching of Silicon to Fabricate 3D Nanostructures', Acs Nano, 3, 4033 (2009).   DOI   ScienceOn
8 K. Rykaczewski, O. J. Hildreth, D. Kulkarni, M. R. Henry, S. K. Kim, C. P. Wong, V. V. Tsukruk and A. G. Fedorov, 'Mask less and Resist-Free Rapid Prototyping of Three-Dimensional Structures Through Electron Beam Induced Deposition (EBID) of Carbon in Combination with Metal-Assisted Chemical Etching (MaCE) of Silicon', ACS App. Mater. & Inter., 2, 969 (2010).   DOI   ScienceOn
9 O. J. Hildreth, D. Brown, and C. P. Wong, '3D Out-of-Plane Rotational Etching with Pinned Catalysts in Metal- Assisted Chemical Etching of Silicon', Adv. Funct. Mater., 21, 3119 (2011).   DOI   ScienceOn
10 K. Rykaczewski, O. J. Hildreth, C. P. Wong, A. G. Fedorov, and J. H. J. Scott, 'Guided Three-Dimensional Catalyst Folding during Metal-Assisted Chemical Etching of Silicon', Nano Lett., 11, 2369 (2011).   DOI   ScienceOn
11 K. Rykaczewski, O. J. Hildreth, C. P. Wong, A. G. Fedorov, and J. H. J. Scott, 'Directed 2D-to-3D Pattern Transfer Method for Controlled Fabrication of Topologically Complex 3D Features in Silicon', Adv. Mater., 23, 659 (2011).   DOI   ScienceOn
12 C. Chartier, S. Bastide, and C. Levy-Clement, 'Metal-Assisted Chemical Etching of Silicon in HF/$H_{2}O_{2}$', Electrochim. Acta, 53, 5509 (2008).   DOI   ScienceOn
13 Y. Q. Qu, L. Liao, Y. J. Li, H. Zhang, Y. Huang, and X. F. Duan, 'Electrically Conductive and Optically Active Porous Silicon Nanowires', Nano Lett., 9, 4539 (2009).   DOI   ScienceOn
14 X. Zhong, Y. Qu, Y.-C. Lin, L. Liao, and X. Duan, 'Unveiling the Formation Pathway of Single Crystalline Porous Silicon Nanowires', ACS Appl. Mater. & Inter., 3, 261 (2011).   DOI   ScienceOn
15 S. Cruz, A. Honig-Dorville, and J. Muller, 'Fabrication and Optimization of Porous Silicon Substrates for Diffusion Membrane Applications', J. Electrochem. Soc., 152, C418 (2005).   DOI   ScienceOn
16 M.-L. Zhang, K.-Q. Peng, X. Fan, J.-S. Jie, R.-Q. Zhang, S.-T. Lee, and N.-B. Wong, 'Preparation of Large-Area Uniform Silicon Nanowires Arrays through Metal- Assisted Chemical Etching', J. Phys. Chem. C, 112, 4444 (2008).
17 A. I. Hochbaum, R. Chen, R. D. Delgado, W. Liang, E. C. Garnett, M. Najarian, A. Majumdar, and P. Yang, 'Enhanced Thermoelectric Performance of Rough Silicon Nanowires', Nature, 451, 163 (2008).   DOI   ScienceOn
18 A. I. Hochbaum, D. Gargas, Y. J. Hwang, and P. Yang, 'Single Crystalline Mesoporous Silicon Nanowires', Nano Lett., 9, 3550 (2009).   DOI   ScienceOn
19 R. Chaoui, B. Mahmoudi, and Y. S. Ahmed, 'Porous Silicon Antireflection Layer for Solar Cells Using Metal-Assisted Chemical Etching', Phys. Status Solidia, 205, 1724 (2008).   DOI   ScienceOn
20 M. Lipinski, 'Macroporous Texturing of Multicrystalline Silicon for Solar Cells', Arch. Metal. Mater., 53, 185 (2008).
21 D. H. Wan, H. L. Chen, S. Y. Chuang, C. C. Yu, and Y. C. Lee, 'Using Self-Assembled Nanoparticles to Fabricate and Optimize Subwavelength Textured Structures in Solar Cells', J. Phys. Chem. C, 112, 20567 (2008).   DOI   ScienceOn
22 K.-Q. Peng, X. Wang, X.-L. Wu, and S.-T. Lee, 'Platinum Nanoparticle Decorated Silicon Nanowires for Efficient Solar Energy Conversion', Nano Lett., 9, 3704 (2009).   DOI   ScienceOn
23 X. W. Geng, M. C. Li, L. C. Zhao, and P. W. Bohn, 'Metal-Assisted Chemical Etching Using Tollen's Reagent to Deposit Silver Nanoparticle Catalysts for Fabrication of Quasi-ordered Silicon Micro/Nanostructures', J. Electron. Mater., 40, 2480 (2011).   DOI   ScienceOn
24 K.-Q. Peng and S.-T. Lee, 'Silicon Nanowires for Photovoltaic Solar Energy Conversion' Adv. Mater., 23, 198 (2011).   DOI   ScienceOn
25 I. Oh, J. Kye and S. Hwang, 'Enhanced Photoelectrochemical Hydrogen Production from Silicon Nanowire Array Photocathode', Nano Lett., 12, 298 (2012).   DOI   ScienceOn
26 B. M. Bang, H. Kim, H. K. Song, J. Cho, and S. Park, 'Scalable Approach to Multi-dimensional Bulk Si Anodes via Metal-assisted Chemical Etching', Energy & Environ. Sci., 4, 5013 (2011).   DOI   ScienceOn
27 Y. M. Liu, B. L. Chen, F. Cao, H. L. W. Chan, X. Z. Zhao, and J. K. Yuan, 'One-pot Synthesis of Three-dimensional Silver-embedded Porous Silicon Micronparticles for Lithium-ion Batteries', J. Mater. Chem., 21, 17083 (2011).   DOI   ScienceOn
28 X. Zhong, H. Zhang, Y. Liu, J. Bai, L. Liao, Y. Huang, and X. Duan, 'High-Capacity Silicon-Air Battery in Alkaline Solution', ChemSusChem, 5, 177 (2012).   DOI   ScienceOn