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http://dx.doi.org/10.5229/JKES.2006.9.4.141

Study of Stress Changes in Nanocrystalline CoW Thin/Thick Film Alloys Eletrodeposited from Citrate Baths  

Cho, Ik-Jong (Department of Applied Materials Engineering, Hanbat National University)
Park, Deok-Yong (Department of Applied Materials Engineering, Hanbat National University)
Ihn, Hyun-Man (Department of Applied Materials Engineering, Hanbat National University)
Publication Information
Journal of the Korean Electrochemical Society / v.9, no.4, 2006 , pp. 141-150 More about this Journal
Abstract
Nanocrystalline CoW thin/thick film alloys were electodeposited from citrate baths to investigate the influences of metal ion concentration, current density and solution pH on chemical composition, current efficiency, residual stress, surface morphology, and microstructure of the film. Deposit W (tungsten) content in CoW thin/thick film increased with increasing W ion concentration, current density, and solution pH in the plating bath. It was observed that residual stress in CoW thin/thick film decreased with increasing W ion concentration and solution pH. CoW thin film exhibited mixed phases of hop Co [(100) and (002)] and hcp $Co_3W$ [(002) and (201)] at W ion concentration with 0.02 to 0.08 M. The microstructure of CoW thin film at W ion concentration of 0.1 to 0.2 M was close to amorphous phase. The dominant phases were found to be hop Co (002) and hop $Co_3W$ [(200), (002) and (201)] at the current densities of 5, 10, 25, and $100mA{\cdot}cm^{-2}$ CoW thin film at the current densities of 50 and $75mA{\cdot}cm^{-2}$ was close to amorphous phase. At solution pH 8.7, CoW thin film exhibited hcp Co (002) and hop $Co_3W$ [(200), (002) and (201)]. Below solution pH 8.7, CoW thin film exhibited amorphous microstructure. The optimum electrodeposition conditions for CoW thin/thick film were found to be W ion concentration of 0.08 M, current density of $10mA{\cdot}cm^{-2}$, and solution pH 8.7.
Keywords
Residual stress; CoW thin films; Electrodeposition; Nanocrystalline;
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Times Cited By KSCI : 1  (Citation Analysis)
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