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http://dx.doi.org/10.5229/JKES.2005.8.1.037

Electrode Properties of Thin Film Battery with LiCoO2 Cathode Deposited by R.F. Magnetron Sputtering at Various Ar Partial Pressures  

Park, H.Y. (Microcell Center, Nuricell Inc.,)
Lim, Y.C. (Microcell Center, Nuricell Inc.,)
Choi, K.G. (Microcell Center, Nuricell Inc.,)
Lee, K.C. (Microcell Center, Nuricell Inc.,)
Park, G.B. (Microcell Center, Nuricell Inc.,)
Kwon, M.Y. (Advanced Technology Research Center, Agency for Defense Development)
Cho, S.B. (Advanced Technology Research Center, Agency for Defense Development)
Nam, S.C. (Microcell Center, Nuricell Inc.,)
Publication Information
Journal of the Korean Electrochemical Society / v.8, no.1, 2005 , pp. 37-41 More about this Journal
Abstract
We investigated the electrochemical properties and microstructure on the various argon deposition pressure $(P_{Ar})$ and the low annealing temperature $(400^{\circ}C)$ of $LiCoO_2$ cathodes, which deposited by R.F. magnetron sputtering. The microsuucture and composition of Lico02 thin film was changed as a function of $P_{Ar}$. The capacity and electrochemical properties were improved with Ph of $LiCoO_2$ thin films. The cycling reversibility and stability of thin film batteries were measured by cyclic voltammetry and the constant current charge-discharge. The physical properties of cathode films were analyzed by ICP-AES, XRD, SEM and AFM for composition, crystallization and surface morphology.
Keywords
Thin film; Microbattery; Sputtering; Cathode.;
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