Optimization of Ar Reshape Process for 4H-SiC Trench MOSFET |
Sung, Min-Je
(National Institute for Nanomaterials Technology, Pohang University of Science and Technology (POSTECH))
Kang, Min-Jae (National Institute for Nanomaterials Technology, Pohang University of Science and Technology (POSTECH)) Kim, Hong-Ki (National Institute for Nanomaterials Technology, Pohang University of Science and Technology (POSTECH)) Kim, Seong-jun (National Institute for Nanomaterials Technology, Pohang University of Science and Technology (POSTECH)) Lee, Jung-Yoon (National Institute for Nanomaterials Technology, Pohang University of Science and Technology (POSTECH)) Lee, Wonbeom (National Institute for Nanomaterials Technology, Pohang University of Science and Technology (POSTECH)) Lee, Nam-suk (National Institute for Nanomaterials Technology, Pohang University of Science and Technology (POSTECH)) Shin, Hoon-Kyu (National Institute for Nanomaterials Technology, Pohang University of Science and Technology (POSTECH)) |
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