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http://dx.doi.org/10.7471/ikeee.2018.22.3.780

Study on the Ferroelectric Properties of ALD-HfO2 in Microwave Band for Tunable RF Apparatus  

Han, Sang-Woo (School of Electronic and Electrical Engineering, Hongik University)
Lee, Chang-Hyun (School of Electronic and Electrical Engineering, Hongik University)
Lee, Jeong-Hae (School of Electronic and Electrical Engineering, Hongik University)
Cha, Ho-Young (School of Electronic and Electrical Engineering, Hongik University)
Publication Information
Journal of IKEEE / v.22, no.3, 2018 , pp. 780-785 More about this Journal
Abstract
In this work, We investigated the frequency-dependent capacitance tunability of a metal-ferroelectric-metal variable capacitor fabricated using ALD $HfO_2$ ferroelectric material. The capacitance of the MFM capacitor could be tuned as a function of the bias voltage, up to the microwave frequency range. We observed a capacitance tuning range of ~3 % up to 2.5 GHz, proving the feasibility of the use of ALD $HfO_2$ in the microwave frequency band.
Keywords
variable capacitor; frequency-dependent capacitance; ferroelectric material; $HfO_2$; MFM capacitor;
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  • Reference
1 R. a York, "Tunable Dielectrics for RF Circuits," in Multifunctional Adaptive Microwave Circuits and Systems, SciTech Pub., 2009.
2 S. P. Antenna et al., "MEMS-Switched , Frequency-Tunable Hybrid Slot/PIFA Antenna," IEEE Antennas and Wireless Propagation Letters, vol.8, pp. 311-314, 2009. DOI:10.1109/LAWP.2009.2015346   DOI
3 L. R. Tan, R. X. Wu, C. Y. Wang, and Y. Poo, "Magnetically tunable ferrite loaded SIW antenna," IEEE Antennas and Wireless Propagation Letters, vol.12, pp. 273-275, 2013. DOI:10.1109/LAWP.2013.2248113   DOI
4 A. C. Polycarpou, M. A. Christou, and N. C. Papanicolaou, "Tunable patch antenna printed on a biased nematic liquid crystal cell," IEEE Transactions on Antennas and Propagation, vol.62, no.10, pp. 4980-4987, 2014. DOI:10.1109/TAP.2014.2344099   DOI
5 H. Y. Li, C. T. Yeh, J. J. Huang, C. W. Chang, C. T. Yu, and J. S. Fu, "CPW-fed frequency-reconfigurable slot-loop antenna with a tunable matching network based on ferroelectric varactors," IEEE Antennas and Wireless Propagation Letters, vol.14, pp. 614-617, 2015. DOI:10.1109/LAWP.2014.2375334   DOI
6 A. a Saif, Z. Azhar, Z. Jamal, Z. Sauli, and P. Poopalan, "Frequency Dependent Electrical Properties of Ferroelectric $Ba_{0.8}Sr_{0.2}TiO_3$ Thin Film," MATERIALS SCIENCE, vol.17, no.2, pp. 0-4, 2011. DOI:10.5755/j01.ms.17.2.490
7 T. V. kumar, "Dielectric Relaxation, Ionic Conduction and Complex Impedance Studies on $NaNo_3$ Fast Ion Conductor," International Journal of Materials Science and Applications, vol.2, no.6, pp. 173, 2013.   DOI
8 K. D. Kim et al., "Ferroelectricity in undoped-$HfO_2$ thin films induced by deposition temperature control during atomic layer deposition," J. Mater. Chem. C, vol.4, no.28, pp. 6864-6872, 2016. DOI:10.1039/C6TC02003H   DOI
9 M. Sazegar et al., "Beam steering transmitarray using tunable frequency selective surface with integrated ferroelectric varactors," IEEE Transactions on Antennas and Propagation, vol.60, no.12, pp. 5690-5699, 2012. DOI:10.1109/TAP.2012.2213057   DOI
10 Y. Ren, Z.-H. Huang, and L.-F. Guo, "A ELECTRICALLY TUNABLE PATCH ANTENNA WITH P(VDF-TRFE) THIN FILM," in Material Engineering and Mechanical Engineering (MEME 2015), pp. 239-245, 2015. DOI:10.1142/9789814759687_0029   DOI