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http://dx.doi.org/10.7471/ikeee.2018.22.2.356

Effect on the Sensitivity of a Hydrogen Sensor by Pd Electrode Patterns at High Temperature  

Kim, Seong-Jeen (Dept. of Electronics Engineering, Kyungnam University)
Publication Information
Journal of IKEEE / v.22, no.2, 2018 , pp. 356-361 More about this Journal
Abstract
We investigated a hydrogen gas sensor which is available in a high temperature atmosphere. The hydrogen sensors were fabricated into a metal-oxide-semiconductor (MOS) structure made of $Pd/Ta_2O_5/SiC$, and the thin tantalum oxide ($Ta_2O_5$) layer was fabricated by rapid thermal oxidation (RTO). In the experiment, we made three types of sensors with different palladium (Pd) patterns to evaluate the effect of Pd electrode on response characteristics. As the result, the response characteristics in capacitance were improved further when the filled area of the Pd electrode became larger.
Keywords
hydrogen; sensor; SiC; pattern; Pd;
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